2001
DOI: 10.1007/s11664-001-0005-3
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Effects of surface treatment using aqua regia solution on the change of surface band bending of p-type GaN

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Cited by 38 publications
(5 citation statements)
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“…The values were −0.59 V versus RHE and −0.62 V versus RHE for the CaTaO 2 N and CaTaO 2 N-A samples, respectively. Lee et al reported a change of surface band bending of p-type GaN after aqua regia treatment. This behavior could also apply for the acid-treated CaTaO 2 N particles.…”
Section: Resultsmentioning
confidence: 99%
“…The values were −0.59 V versus RHE and −0.62 V versus RHE for the CaTaO 2 N and CaTaO 2 N-A samples, respectively. Lee et al reported a change of surface band bending of p-type GaN after aqua regia treatment. This behavior could also apply for the acid-treated CaTaO 2 N particles.…”
Section: Resultsmentioning
confidence: 99%
“…Devices with Pd/Au contacts were then fabricated using standard procedures. First, the samples were immersed in 3:1 mixture of boiling HCl:HNO 3 for 30 min to remove the indium and surface oxide layer [11]. A pattern was applied using photoresist which included circular contacts with a 40 μm radius.…”
Section: Methodsmentioning
confidence: 99%
“…For n-type GaN, it is easy to obtain low resistance ohmic contact (<10 −5 cm 2 ) by using Ti/Al, Ti/Au and Ti/Al/Ti/Au metal schemes. However, it is difficult to achieve such low contact resistivity to p-type GaN because of the low hole concentrations in p-type GaN and high Schottky barrier height at metal/p-type GaN interfaces [5]. In order to achieve low contact resistivity to p-type GaN, a number of research groups have investigated possible solutions, such as chemical treatment of p-GaN surface [5][6][7][8], choosing different metal schemes [9][10][11][12], inserting a thin InGaN capping layer to control the surface polarization field [13] and inserting a thin excessive Mg doping capping layer [2,4,14].…”
Section: Introductionmentioning
confidence: 99%
“…However, it is difficult to achieve such low contact resistivity to p-type GaN because of the low hole concentrations in p-type GaN and high Schottky barrier height at metal/p-type GaN interfaces [5]. In order to achieve low contact resistivity to p-type GaN, a number of research groups have investigated possible solutions, such as chemical treatment of p-GaN surface [5][6][7][8], choosing different metal schemes [9][10][11][12], inserting a thin InGaN capping layer to control the surface polarization field [13] and inserting a thin excessive Mg doping capping layer [2,4,14]. Currently, excessive Mg doping capping layer is widely used in the GaN-based semiconductor because of its good reproducibility, process simplicity and excellent contact properties [3].…”
Section: Introductionmentioning
confidence: 99%