1983
DOI: 10.1016/0038-1101(83)90107-7
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Effects of surface treatments on the electrical characteristics of bipolar transistors with polysilicon emitters

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Cited by 39 publications
(2 citation statements)
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“…A recent trend has been to use heavily doped polysilicon deposited on top of deliberately grown oxides of tunneling thickness in lieu of the metallic conductor [6], [7]. This is a more practical approach in that it allows high-temperature processing after the formation of the CIS structure.…”
Section: Novel Nmos Transistors Wi O Depth Conductor/thin Insulator/ mentioning
confidence: 99%
“…A recent trend has been to use heavily doped polysilicon deposited on top of deliberately grown oxides of tunneling thickness in lieu of the metallic conductor [6], [7]. This is a more practical approach in that it allows high-temperature processing after the formation of the CIS structure.…”
Section: Novel Nmos Transistors Wi O Depth Conductor/thin Insulator/ mentioning
confidence: 99%
“…Silicon bipolar transistors with emitter contacts comprising a polysilicon-insulator tunnel junction are presently receiving considerable attention (1)(2)(3)(4)(5)(6)(7)(8). The actual emitter in these devices is formed in monocrystalline silicon by a variety of methods.…”
Section: Introductionmentioning
confidence: 99%