ABo 2 delafossites are fascinating materials that exhibit a wide range of physical properties, including giant Rashba spin splitting and anomalous Hall effects, because of their characteristic layered structures composed of noble metal A and strongly correlated Bo 2 sublayers. However, thin film synthesis is known to be extremely challenging owing to their low symmetry rhombohedral structures, which limit the selection of substrates for thin film epitaxy. Hexagonal lattices, such as those provided by Al 2 o 3 (0001) and (111) oriented cubic perovskites, are promising candidates for epitaxy of delafossites. However, the formation of twin domains and impurity phases is hard to suppress, and the nucleation and growth mechanisms thereon have not been studied for the growth of epitaxial delafossites. In this study, we report the epitaxial stabilization of a new interfacial phase formed during pulsed-laser epitaxy of (0001)-oriented CuCrO 2 epitaxial thin films on Al 2 o 3 substrates. Through a combined study using scanning transmission electron microscopy/electronenergy loss spectroscopy and density functional theory calculations, we report that the nucleation of a thermodynamically stable, atomically thick CuCr 1−x Al x o 2 interfacial layer is the critical element for the epitaxy of CuCrO 2 delafossites on Al 2 o 3 substrates. This finding provides key insights into the thermodynamic mechanism for the nucleation of intermixing-induced buffer layers that can be used for the growth of other noble-metal-based delafossites, which are known to be challenging due to the difficulty in initial nucleation. ABO 2 delafossite oxides have attracted considerable interest because of their fascinating properties that depend on the choice of A and B site elements 1-3. Metallic delafossites, especially PdCoO 2 and PdCrO 2 , exhibit very high conductivity on the order of 10-8 Ω cm with an extremely long mean free path of l m ~ 20 μm at low temperatures 4,5. While the high conductivity and the large spin-orbit coupling associated with huge Rashba splitting 6 make such metallic delafossites promising candidates for future spintronic devices, their synthesis in thin film forms has not been established. There have been several attempts to grow metallic delafossite thin films, and Pd-based delafossites were recently grown by pulsed laser epitaxy (PLE) 7-9 and molecular beam epitaxy (MBE) 10,11. The quality and performance of thin films, however, are not as good as those of single crystals, thus further improvements are needed. The major problem that needs to be overcome is the poor structural quality due to the formation of twin domains and impurity phases 7-11 , which mainly originate from the initial nucleation and structural dissimilarity between the film and substrate. To achieve high quality thin films, therefore, not only is an isostructural substrate or buffer layer with similar lattice parameters needed, but also a deeper understanding on the nucleation and growth mechanisms. Among various delafossite compounds, Cu-based delafossi...