Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

Bannuru, Thirumalesh; Narksitipan, Suparut; Brown, W. L.; Vinci, Richard P.

doi:10.1117/12.700834

Cited by 4 publications

(2 citation statements)

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“…Pt series metals, as hard metal materials, have the advantages of high softening temperature, high corrosion resistance, and high wear resistance [ 26 ]. If the contacts and the bottom contact area are all made of Pt series metals, the plastic deformation of the contacts can be decreased, and the power processing and reliability of the switch can be significantly improved.…”

Section: Implementation Of Highly Reliable Contactsmentioning

confidence: 99%

Implementation of Highly Reliable Contacts for RF MEMS Switches

Jiang,

Wang,

Huang

et al. 2024

Micromachines

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A contact is the key structure of RF MEMS (Radio Frequency Microelectromechanical System) switches, which has a direct impact on the switch’s electrical and mechanical properties. In this paper, the implementation of highly reliable contacts for direct-contact RF MEMS switches is provided. As a soft metal material, gold has the advantages of low contact resistance, high chemical stability, and mature process preparation, so it is chosen as the metal material for the beam structure as well as the contacts of the switch. However, a Pt film is used in the bottom contact area to enhance the reliability of the contact. Three kinds of contacts with various shapes are fabricated using different processes. Particularly, a circular-shaped contact is obtained by dry/wet combined processes. The detailed fabrication process of the contacts as well as the Pt film on the bottom contact area are given. The experimental test shows that the contact shape has little effect on the RF performance of the switches. However, the circular contact shows better reliability than other contacts and can work well even after 1.2 × 109 cycles.

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Section: Implementation Of Highly Reliable Contactsmentioning

confidence: 99%

Implementation of Highly Reliable Contacts for RF MEMS Switches

Jiang,

Wang,

Huang

et al. 2024

Micromachines

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“…It has been shown, for instance, that Pt-IrO x can have a significantly lower coefficient of thermal expansion than pure Pt and therefore undergoes smaller stress changes and less plasticity during thermal cycling while adhered to a Si substrate [1]. The combined electrical and mechanical advantages of Au-V 2 O 5 films over pure Au or Au-V solid solution films have been recently shown for contact applications where low contact resistance and high hardness are advantageous [2]. These two systems both have a noble metal matrix, but also have solutes with significantly different oxygen affinities.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Pt-IrOx and Au-V2O5 Thin Films

Vinci

Bannuru

Hyun

et al. 2007

KEM

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Pt-IrOx and Au-V2O5 thin films were created by magnetron co-sputtering from multiple targets in an Ar-O2 mixture. Successful Pt-IrOx production required high O2 partial pressure and slow deposition rate followed by post-annealing in pure O2. In contrast, deposition of Au-V2O5 films required relatively low O2 partial pressure, and did not need any post-anneal. These different strategies for forming oxide dispersion strengthened films in a multi-target reactive sputtering configuration are directly related to the thermodynamic characteristics of the two materials systems. The most important characteristics are the low equilibrium oxygen solubility in Pt and Au, and the different degrees of oxygen affinity by Ir and V.

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