Effects of Vapor Environment and Counter-Surface Chemistry on Tribochemical Wear of Silicon Wafers

Marchand, David J.; Chen, Lei; Meng, Yonggang; Qian, Linmao; Kim, Seong H.

doi:10.1007/s11249-013-0276-x

Cited by 13 publications

(12 citation statements)

References 34 publications

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“…In atomic force microscopy (AFM) experiments, the amorphous SiO 2 was shown to be worn with a SiO 2 tip under a low load, while a diamond tip, which is chemically inert yet harder than the SiO 2 , was unable to wear the Si wafer coated with native oxide under a similar load [118,119]. These results suggested that the chemistry of the SiO 2 surfaces contributes to the wear of the material at loads lower than the hardness value causing mechanical deformation of the material.…”

Section: Environmental Effect On Friction and Wear Of Oxides And Glassesmentioning

confidence: 99%

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

et al. 2015

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Tribology involves not only two-body contacts of two solid materials-a substrate and a counter-surface; it often involves three-body contacts whether the third body is intentionally introduced or inevitably added during the sliding or rubbing. The intentionally added third body could be lubricant oil or engineered nanomaterial used to mitigate the friction and wear of the sliding contact. The inevitably added third body could be wear debris created from the substrate or the counter surface during sliding. Even in the absence of any solid third-body between the sliding surfaces, molecular adsorption of water or organic vapors from the surrounding environment can dramatically alter the friction and wear behavior of solid surfaces tested in the absence of lubricant oils. This review article covers the last case: the effects of molecular adsorption on sliding solid surfaces both inevitably occurring due to the ambient test and intentionally introduced as a solution for engineering problems. We will review how adsorbed molecules can change the course of wear and friction, as well as the mechanical and chemical behavior, of a wide range of materials under sliding conditions.

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Section: Environmental Effect On Friction and Wear Of Oxides And Glassesmentioning

confidence: 99%

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

et al. 2015

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“…This tribochemical wear of silicon occurs only with the existence of water molecules [13]. When the alcohol vapor was introduced into the AFM chamber, the adsorbed alcohol molecules could form a lubrication layer and protect the silicon substrate [21][22][23][24][25].…”

Section: Lubrication Of Adsorbate Ethanol Layermentioning

confidence: 99%

“…It was reported that the alcohol vapor could successfully prevent the silicon wear when the full coverage of alcohol layer was formed on substrate surface [21,25]. In that case, due to the lubrication of adsorbate alcohol layer, the friction coefficient would be consistent with 0.2 whether the tests were operated in AFM and MEMS devices at nano/micro-scale or in pin-on-disc tribometers at macro-scale [21][22][23][24][25]44,45]. However, the tribochemical wear of silicon was found to be completely suppressed at relatively low P a /P sat (o30%) where a partial coverage of ethanol adsorbate layer was expected on silicon surface (For example: Fig.…”

Section: 2mentioning

confidence: 99%

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Effect of coadsorption of water and alcohol vapor on the nanowear of silicon

Chen

Yang

et al. 2015

Wear

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“…For example, the nanowear results of silicon surfaces could vary significantly when rubbing against different countersurfaces [14][15][16]. A deep wear of silicon in humid environments occurred only when the counter-surface was SiO 2 , while a hillock formation on the silicon substrate was observed when the counter-surface was diamond [14].…”

Section: Introductionmentioning

confidence: 99%

Effects of humidity and counter-surface on tribochemical wear of soda-lime-silica glass

Qian

Pantano

et al. 2015

Wear

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a b s t r a c tThe effects of counter-surface chemistry on the friction and wear of soda-lime-silica glass were investigated using a ball-on-flat tribometer with various ball materials (stainless steel, silicon nitride, and alumina) in dry and humid environments. It was found that the interfacial wear was very sensitive to environmental humidity and counter-surface chemistry. In dry conditions, soda-lime glass was damaged mechanically regardless of counter-surface materials, creating a rough and deep wear track. These results were consistent with the Archard relationship-a softer material would wear mechanically by a harder material. However, in humid conditions, the ball materials that were harder than the soda-lime glass were damaged. Thus, the wear of glass interfaces under humid conditions does not follow the Archard relationship. These results clearly show that the tribochemical reactions involving the substrate and counter-surface chemistry as well as the adsorbed water molecules are determining factors governing wear behaviors in humid environments.

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Effects of Vapor Environment and Counter-Surface Chemistry on Tribochemical Wear of Silicon Wafers

Cited by 13 publications

References 34 publications

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

Effect of coadsorption of water and alcohol vapor on the nanowear of silicon

Effects of humidity and counter-surface on tribochemical wear of soda-lime-silica glass

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