Effects of water and oxygen on the tribochemical wear of monocrystalline Si(100) against SiO2 sphere by simulating the contact conditions in MEMS

Wang, X.D.; Yu, Jiaxin; Chen, L.; Qian, Linmao; Zhou, Zhongrong

doi:10.1016/j.wear.2010.11.043

Cited by 25 publications

(21 citation statements)

References 33 publications

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“…These results suggested that the chemistry of the SiO 2 surfaces contributes to the wear of the material at loads lower than the hardness value causing mechanical deformation of the material. The proposed mechanism for wear of the native oxide layer, the creation of siloxane bridges (chemical bonds) [120], could pertain to the glass wear behavior [121,122]. A surface force apparatus study found that the adhesion force of two silica surfaces in humid conditions was greater than the capillary force expected from water [123].…”

Section: Environmental Effect On Friction and Wear Of Oxides And Glassesmentioning

confidence: 99%

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

et al. 2015

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Tribology involves not only two-body contacts of two solid materials-a substrate and a counter-surface; it often involves three-body contacts whether the third body is intentionally introduced or inevitably added during the sliding or rubbing. The intentionally added third body could be lubricant oil or engineered nanomaterial used to mitigate the friction and wear of the sliding contact. The inevitably added third body could be wear debris created from the substrate or the counter surface during sliding. Even in the absence of any solid third-body between the sliding surfaces, molecular adsorption of water or organic vapors from the surrounding environment can dramatically alter the friction and wear behavior of solid surfaces tested in the absence of lubricant oils. This review article covers the last case: the effects of molecular adsorption on sliding solid surfaces both inevitably occurring due to the ambient test and intentionally introduced as a solution for engineering problems. We will review how adsorbed molecules can change the course of wear and friction, as well as the mechanical and chemical behavior, of a wide range of materials under sliding conditions.

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Section: Environmental Effect On Friction and Wear Of Oxides And Glassesmentioning

confidence: 99%

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

et al. 2015

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“…Due to the oxidation reaction with oxygen and water in air, the bare silicon surface exposed to air for a long time is normally covered by a layer of native oxide (SiO x ), with typical thickness of <2 nm. The growth of the SiO x layer changes surface wettability and chemical reactivity, and further significantly affects the humidity dependence of tribological properties (i.e., adhesion, force, and wear) of silicon [143].…”

Section: Silicon and Silicon Oxidesmentioning

confidence: 99%

Effect of Humidity on Friction and Wear—A Critical Review

et al. 2018

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The friction and wear behavior of materials are not intrinsic properties, but extrinsic properties; in other words, they can drastically vary depending on test and environmental conditions. In ambient air, humidity is one such extrinsic parameter. This paper reviews the effects of humidity on macro- and nano-scale friction and wear of various types of materials. The materials included in this review are graphite and graphene, diamond-like carbon (DLC) films, ultrananocrystalline diamond (UNCD), transition metal dichalcogenides (TMDs), hexagonal boron nitride (h-BN), boric acid, silicon, silicon oxide, silicates, advanced ceramics, and metals. Details of underlying mechanisms governing friction and wear behaviors vary depending on materials and humidity; nonetheless, a comparison of various material cases revealed an overarching trend. Tribochemical reactions between the tribo-materials and the adsorbed water molecules play significant roles; such reactions can occur at defect sites in the case of two-dimensionally layered materials and carbon-based materials, or even on low energy surfaces in the case of metals and oxide materials. It is extremely important to consider the effects of adsorbed water layer thickness and structure for a full understanding of tribological properties of materials in ambient air.

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“…During running-in, because the peaks of asperities on rough contact surfaces are removed by mechanical interactions and valleys are filled by wear debris, the average surface roughness of specimens would decrease to a stable state [7,8]. The generation of wear debris as a three-body layer might lubricate contact interfaces [9,10]. As a result, both the friction force and the wear rate may decrease and then level off during macroscale running-in.…”

Section: Introductionmentioning

confidence: 99%

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

et al. 2013

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Abstract:Using an atomic force microscope, the running-in process of a single crystalline silicon wafer coated with native oxide layer (Si-SiO x ) against a SiO 2 microsphere was investigated under various normal loads and displacement amplitudes in ambient air. As the number of sliding cycles increased, both the friction force F t of the Si-SiO x /SiO 2 pair and the wear rate of the silicon surface showed sharp drops during the initial 50 cycles and then leveled off in the remaining cycles. The sharp drop in F t appeared to be induced mainly by the reduction of adhesion-related interfacial force between the Si-SiO x /SiO 2 pair. During the running-in process, the contact area of the Si-SiO x /SiO 2 pair might become hydrophobic due to removal of the hydrophilic oxide layer on the silicon surface and the surface change of the SiO 2 tip, which caused the reduction of friction force and the wear rate of the Si-SiO x /SiO 2 pair. A phenomenological model is proposed to explain the running-in process of the Si-SiO x /SiO 2 pair in ambient air. The results may help us understand the mechanism of the running-in process of the Si-SiO x /SiO 2 pair at nanoscale and reduce wear failure in dynamic microelectromechanical systems (MEMS).

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Effects of water and oxygen on the tribochemical wear of monocrystalline Si(100) against SiO2 sphere by simulating the contact conditions in MEMS

Cited by 25 publications

References 33 publications

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

Vapors in the ambient—A complication in tribological studies or an engineering solution of tribological problems?

Effect of Humidity on Friction and Wear—A Critical Review

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

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