After decades of discussions, it has been firmly established
that detectors made of silicon-based semiconductor materials can be
effectively used for neutron detection by simply coating them with
suitable substances. The incident thermal neutrons interact with the
coating neutron-sensitive materials such as 10B and 6LiF,
resulting in the production of secondary charged particles which can
be effectively detected in the sequencial silicon substrate. In this
article, the detector system was designed with a coupled neutron
detector structure which combined a silicon detector with a
10B4C film in various forms. The 10B4C layer was
deposited on the substract with electron beam evaporation
method. Two kinds of structrue were discussed: (1) one was the
direct contact neutron detector by depositing 10B4C
directly onto the front surface of silicon-based detectors; (2) the
other was the coupled neutron detectors by depositing
10B4C onto substrates made from different materials such
as Al and glass which then coupled with silicon-based detectors. The
responses of these neutron detectors to neutrons (Cf-252) were
measured individually. It's showen that the detection capability of
direct contact neutron detectors was lower than the coupled neutron
detectors. For the coupled detectors, the detector by depositing
10B4C on the aluminum substrate was found to be superior
than that by depositing 10B4C on the glass substrate.