The excitation of elastic vibrations of fibers upon inertial deposition of submicron aerosol particles in the course of gas filtration through fine fiber filters has been considered. Equations describing the dynam ics of the interaction of several aerosol particles with a fiber have been derived. It has been shown that, in the case of heavy particles and long fibers, particles that have been previously deposited onto the fibers can be knocked out upon an impact of a fast particle. Moreover, it has been demonstrated that fast particles can pen etrate through traps consisting of several fibers due to the deformation of the latter. All these processes may have a substantial effect on the filtration performance in the inertial regime.