2019
DOI: 10.1088/1361-6439/ab4ed7
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Efficient and improved qualification method for patterns with irregular edges in printed electronics

Abstract: This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations.With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, … Show more

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Cited by 5 publications
(10 citation statements)
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“…AOI ML AI [4] Non-EM patterns (noticeable LER tolerance) Yes No No [13] Non-EM pattern (improved LER tolerance) Yes No No [14] EM pattern (improved LER efficiency with one-arm distortion) Yes No No [15] EM pattern (improved LER efficiency with one-arm distortion) Yes Yes (passive signal) Yes (passive signal) This work EM pattern (improved LER efficiency with two-arm distortion) Yes Yes (active signal) Yes (active signal) aforementioned activities are considered an earlywarning system and in case the characteristics deviated from the expected values, actions such as rework or scrap can be made to save time and suppress further cost. However, before Metal-1, plenty time and cost have already been spent, thus engineers also consider other possible examination methods.…”
Section: Supportivenessmentioning
confidence: 99%
See 1 more Smart Citation
“…AOI ML AI [4] Non-EM patterns (noticeable LER tolerance) Yes No No [13] Non-EM pattern (improved LER tolerance) Yes No No [14] EM pattern (improved LER efficiency with one-arm distortion) Yes No No [15] EM pattern (improved LER efficiency with one-arm distortion) Yes Yes (passive signal) Yes (passive signal) This work EM pattern (improved LER efficiency with two-arm distortion) Yes Yes (active signal) Yes (active signal) aforementioned activities are considered an earlywarning system and in case the characteristics deviated from the expected values, actions such as rework or scrap can be made to save time and suppress further cost. However, before Metal-1, plenty time and cost have already been spent, thus engineers also consider other possible examination methods.…”
Section: Supportivenessmentioning
confidence: 99%
“…All 144 samples in the training group went through identical LER analysis procedures [14]. The LERs of the two contours on both arms of one SCASA were collected.…”
Section: Ler Analysismentioning
confidence: 99%
“…To ensure the fabrication quality of PCBs, researchers have proposed various methods to quantify pattern integrity by evaluating their visual appearance using automatic optical inspection (AOI) procedures [ 1 , 2 ]. Line width roughness (LWR) [ 3 ] and line edge roughness (LER) [ 4 ] have been adopted, which facilitate the evaluation with scientific and quantified indicators. Process instability can thus be determined or suspected by identifying geometric changes [ 5 ].…”
Section: Introductionmentioning
confidence: 99%
“…Although literature has indicated potential relationships between pattern distortion and its EM performance [9][10][11][12][13], they failed to provide solutions to predict the results. Researchers also tried to establish related system and procedures to predict some responses of Archimedean spiral antennas through their fabrication features, results were incomplete due to impractical target design, non-optimized software and hardware modules, insufficient data, low confidence level of results, and non-integrated humanmachine interface (table 1) [14,15].…”
Section: Introductionmentioning
confidence: 99%