Efficient computation methods for 3D microscopic ellipsometry

Abstract

We review theoretical models for describing light scattering from various distributions of micro/nano structures on a substrate. We review results obtained by rigorous coupled wave analysis (RCWA) and the multilayer Green's function (GF) method with geometry-adapted basis functions and compare the pros and cons. We show that the GF method is particularly useful for calculating the ellipsometry spectra of a variety of systems efficiently and accurately. The calculated ellipsometric spectra can be compared with experimental data for a large frequency range to extract the critical dimensions of structure features. Finally, we show how to use the GF method to compute signals of microscopic imaging ellipsometry efficiently, including examples on light scattering spectra for ZnO microspheres and the polarization-dependent reflectance images.

Broadband multiple responses of surface modes in quasicrystalline plasmonic structure

“…Therefore, the intrinsic periodicity in the quasicrystalline lattice makes the Floquet’s theory still be effective and the RCWA has been used to calculate the 1D Fibonacci grating 19 . Utilization the RCWA on studying the diffraction properties of 2D octagonal quasicrystalline structure is also found 21 22 .…”