This paper studies the effect of the embedded thin-film metallization layer, normally designed as ground plane, on the transient characteristics of pulse propagation in silicon-based multilayer interconnects. The spectral domain approach (SDA) and FFT are used to analyze an on-chip thin-film microstrip line (TFMSL) structure. It is found that such thin-film metallization can excite the slow wave. And the thickness factor has great influences on the signal distortion.
IntroductionThe transient characterization of electric interconnect and metallization structures have become an essential issue in the design of nowadays silicon-based integrated circuits (ICs), such as highspeed digital VLSI circuits, multichip modules (MCMs) and radio-frequency integrated circuits (RFICs). Because the signals in such IC's interconnects spread from dc up to the millimeterwave frequency and even beyond, the dispersion and losses from interconnects and lossy substrates will induce the amplitude attenuation and the waveform distortion of signals. Some on-chip planar multilayer structures have been proposed to achieve size reduction as well as improved transmission characteristics: the TFMSL [1], patterned ground shield [2], etc., where thin-film metallization layers are embedded as ground planes. Unlike conventional lossless microstrip transmission lines, in which the higher harmonic of pulses (compared to the inflection frequency) will travel at a lower velocity than the lower harmonics, typical IC interconnects are fabricated on lossy silicon substrates so as to owe three possible signal-propagation modes: the slow-wave mode, the skin-effect mode, and the quasi-TEM mode [3]. At low frequencies, the slow-wave mode becomes dominant. Besides, since the minimized thin-film ground is composed of real metal with finite conductivity, its profile dimension may be comparable to the relative skin depth a at certain frequencies. Thus the electromagnetic (EM) energy may leak through it into substrates backing this thin film to trigger high dispersion. Although several authors used approximation formula or equivalent circuit models to study the wave propagation [1]-[4], it is still difficult to investigate Air the dispersive characterization with a circuit model over a t a broad frequency range, which is required for transient analysis. / / s In order to qualify the analysis of such thin-film metallization, the full-wave EM method is definitely a need for the accurate PEC Ground transient analysis and for the validation of CAD designs. Fig. 1. TFMSL-type interconnect on Si substrate and SiO2 layer; w: In this paper, the thickness effect of the thin-film metallization signal line width; t: metallization layer on the transient signal propagation is studied by the SDA thickness; sc and us: metal and Si [5] with the FFT technique. One TFMSL-type interconnection conductivity; (Si: 250 pim; cr: 12; is used to show that the transient pulse propagation is 7s: 5 S/m; Cu: o7c: 58x10 S/m;influenced by the presence of the thin-film metal ground layer. SiO2:...