An absorption-reduced planar waveguide structure is proposed for increasing the efficiency of terahertz (THz) pulse generation by optical rectification of femtosecond laser pulses with tiltedpulse-front in highly nonlinear materials with large absorption coefficient. The structure functions as waveguide both for the optical pump and the generated THz radiation. Most of the THz power propagates inside the cladding with low THz absorption, thereby reducing losses and leading to the enhancement of the THz generation efficiency by up to more than one order of magnitude, as compared with a bulk medium. Such a source can be suitable for highly efficient THz pulse generation pumped by low-energy (nJ-lJ) pulses at high (MHz) repetition rates delivered by compact fiber lasers. The recent years witnessed a rapid development of pulsed terahertz (THz) sources driven by femtosecond lasers, which became an enabling tool for new research directions such as nonlinear THz spectroscopy. THz sources with high peak intensity typically require pump pulses with mJ-level energy, thereby usually limiting the pulse repetition rate to the kHz range. Linear and nonlinear THz spectroscopic studies and other applications highly benefit from increased repetition rate, and there is a strong need to develop efficient THz sources with significantly higher (1-100 MHz) repetition rates. Fiber laser technology provides commercially available sources with superior stability and compactness delivering femtosecond pulses at high repetition rates but with moderate pulse energy (up to the 10-lJ level). It is challenging to design efficient THz sources based on optical rectification (OR) at these small or moderate pump pulse energies.The efficiency of OR can be increased by cylindrical focusing, or by using waveguide or waveguide-like structures. [1][2][3][4][5][6][7][8][9] In case of materials with high nonlinearity but strong absorption in the THz range, such as LiNbO 3 (LN) with d 33 ¼ 168 pm/V nonlinear optical coefficient 10 and tens of cm À1 absorption coefficient, 11 it is important to suppress absorption. A promising way to achieve this is to sandwich a few lm thick LN layer between layers of significantly smaller absorption.1-5 A suitable material for such a lowabsorption cladding is silicon (Si). The structures reported so far are guiding only the optical pump; 1-5 the selected material parameters and dimensions do not allow wave guiding in the THz range. Consequently, the THz radiation leaves the LN layer through its boundary to the cladding. This reduces the propagation length of the generated THz radiation inside LN, thereby minimizing absorption losses. However, because of the reduced interaction length, the efficiency of THz generation is lower than it could be for a (velocitymatched) structure guiding both pump and THz. In the former case it is the intensity, while in the latter case it is the field strength of the THz components generated at different locations, which is summed up. Latter can enable to achieve a significantly higher THz...