“…Thus, the electrolyte permeated through the porosities preferentially attacks the underlying Si substrates because the electrochemical stability of the Si substrates is lower than that of the DLC films [10]. At the same time, the permeated electrolyte causes galvanically-induced corrosion between the films and the substrates due to their different electrochemical potentials [10]. In addition, the attack of the electrochemically active species in the electrolyte on the film/substrate interfaces can result in undermining of the films.…”