Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing

Yoon, Jung‐Sik; Song, M Y; Kato, H.; Hoshino, M.; Tanaka, Hiroshi; Brunger, M. J.; Buckman, Stephen; Cho, Hyuck

doi:10.1063/1.3475647

Cited by 36 publications

(25 citation statements)

References 56 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…There is also qualitative agreement between the SEP ICS and the experimental TCS of Wan et al [6]. Figures 7,8, and 9 show the differential cross sections (DCS's) at 2,3,4,5,6,7,8,9, and 10 eV for the SiCl 4 , SiBr 4 , and SiI 4 molecules. There are no experimental data or other theoretical results at those energies for comparison.…”

Section: Resultssupporting

confidence: 70%

See 1 more Smart Citation

Elastic collisions of low-energy electrons with SiY4(Y=Cl, Br, I) molecules

Bettega

2011

Phys. Rev. A

View full text Add to dashboard Cite

We employed the Schwinger multichannel method to compute elastic integral, differential, and momentum transfer cross sections for low-energy electron collisions with SiY 4 (Y = Cl, Br, I) molecules. The calculations were carried out in the static-exchange and static-exchange plus polarization approximations for energies up to 10 eV. The elastic integral cross section for SiCl 4 and SiBr 4 , computed in the static-exchange plus polarization approximation, shows two shape resonances belonging to the T 2 and E symmetries of the T d group, and for SiI 4 shows one shape resonance belonging to the E symmetry of the T d group. The present results agree well in shape with experimental total cross sections. The positions of the resonances observed in the calculated integral cross sections are also in agreement with the experimental positions. We have found the presence of a virtual state for SiCl 4 and a Ramsauer-Townsend minimum for SiI 4 at 0.5 eV. The present results show that the proper inclusion of polarization effects is crucial in order to correctly describe the resonance spectra of these molecules and also to identify a Ramsauer-Townsend minimum for SiI 4 and a virtual state for SiCl 4 .

show abstract

Section: Resultssupporting

confidence: 70%

“…Therefore, it would be practical and very useful for low-temperature plasma modelers to have a cross-section database for electron collisions with molecules used as gas precursors available in the literature. However, this database is far from complete [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Elastic collisions of low-energy electrons with SiY4(Y=Cl, Br, I) molecules

Bettega

2011

Phys. Rev. A

View full text Add to dashboard Cite

show abstract

“…1) is well resolved from the ground state and its other excited states, and it is therefore on this triplet state that we concentrate in this study. Differential cross sections (DCSs) for electron impact excitation of the ã 3 30 eV, and (c) 50 eV incident electron energy, obtained at a variety of kinematical conditions as denoted on the respective plots. They all clearly show the ã 3 B 1u peak being separated from the others.…”

Section: Introductionmentioning

confidence: 99%

“…2 This development in theory calls for a parallel advancement on the side of experiment since quantitative experimental data, required to test the theoretical models, remain limited and somewhat fragmentary. 3,4 Finally, scientists have become increasingly concerned about the interaction of radiation (including electrons) with molecules (especially biomolecules). In particular, it is now appreciated that low energy a) Electronic mail: Michael.Brunger@flinders.edu.au.…”

Section: Introductionmentioning

confidence: 99%

Electron impact excitation of the ã 3B1u electronic state in C2H4: An experimentally benchmarked system?

Thao

Nixon

Fuß

et al. 2012

The Journal of Chemical Physics

Self Cite

View full text Add to dashboard Cite

We report on differential and integral cross section measurements for the electron impact excitation of the lowest-lying triplet electronic state (ã 3B1u) in ethylene (C2H4). The energy range of the present experiments was 9 eV–50 eV, with the angular range of the differential cross section measurements being 15°–90°. As the ground electronic state of C2H4 is a 1Ag state, this singlet → triplet excitation process is expected to be dominated by exchange scattering. The present angular distributions are found to support that assertion. Comparison, where possible, with previous experimental results from the University of Fribourg group shows very good agreement, to within the uncertainties on the measured cross sections. Agreement with the available theories, however, is generally marginal with the theories typically overestimating the magnitude of the differential cross sections. Notwithstanding that, the shapes of the theoretical angular distributions were in fact found to be in good accord with the corresponding experimental results.

show abstract

“…Some of the examples are: (1) planetary atmospheres bombarded by photons and charged particles [1,2], (2) practical understanding of atmospheric reentry physics in space programs [3], (3) modeling of chemical plasmas for surface treatments [4][5][6][7], (4) DNA fragmentation induced by electron attachment (motivation for studying several biomolecules) [8], (5) nanomaterials fabrication using focused electron-beam-induced processing [9,10] and more recently (6) pre-treatment (de-lignification) of biomass to obtain biofuels [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Recent advances in the application of the Schwinger multichannel method with pseudopotentials to electron-molecule collisions

et al. 2015

View full text Add to dashboard Cite

Abstract. The Schwinger multichannel method [K. V. McKoy, Phys. Rev. A 30, 1734 (1984)], which is based on the Schwinger variational principle for the scattering amplitude [J. Schwinger, Phys. Rev. 72, 742 (1947)], was designed to account for exchange, polarization and electronically multichannel coupling effects in the low-energy region of electron scattering from molecules with arbitrary geometry. The applications of the method became more ambitious with the availability of computer power combined with parallel processing, use of norm-conserving pseudopotentials and improvement of the description of target excited states (minimal orbital basis for single configuration interaction). The most recent applications involving 33 and 45 electronically open channels for phenol and ethylene molecules, represent good examples of the present status of the method. In this colloquium, we review the strategy and point out new directions to apply the method in its full extension.

show abstract

Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing

Cited by 36 publications

References 56 publications

Elastic collisions of low-energy electrons with SiY4(Y=Cl, Br, I) molecules

Elastic collisions of low-energy electrons with SiY4(Y=Cl, Br, I) molecules

Electron impact excitation of the ã 3B1u electronic state in C2H4: An experimentally benchmarked system?

Recent advances in the application of the Schwinger multichannel method with pseudopotentials to electron-molecule collisions

Contact Info

Product

Resources

About