Elastic properties of porous silicon nitride fabricated via a low-temperature processing route

Kota, Navya; Jana, Prasanta; Roy, Siddhartha

doi:10.1016/j.ceramint.2022.10.178

Cited by 10 publications

(1 citation statement)

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“…Silicon nitride (Si 3 N 4 ) ceramic is one of the important materials in the fields of aerospace and military industry because of its high temperature stability, excellent wear and corrosion resistance, good insulation and electromagnetic wave transparency [ 1 , 2 , 3 , 4 ]. For improving the performance of aerospace or missile products, such as hydrophobicity and self-cleaning properties, some special microstructures need to be manufactured on the surface of silicon nitride materials [ 5 , 6 ]. However, the high brittleness and low fracture toughness make it extraordinarily difficult to machine microstructures on the surface of silicon nitride ceramics [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Wen,

Gao,

Zhang

et al. 2024

Micromachines

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Machining special microstructures on the surface of silicon nitride ceramics helps improve their service performance. However, the high brittleness and low fracture toughness of silicon nitride ceramics make it extremely difficult to machine microstructures on their surface. In this study, a femtosecond laser is used to machine parallel grooved microstructures on the surface of silicon nitride ceramics. The effects of the laser polarization angle, laser single pulse energy, scanning line spacing, and laser scan numbers on the surface morphology and geometric characteristics of grooved microstructures are researched. It is found that a greater angle between the direction of the scanning path and laser polarization is helpful to obtain a smoother surface. As the single pulse energy increases, debris and irregular surface structures will emerge. Increasing the laser scan line spacing leads to clearer and more defined parallel grooved microstructures. The groove depth increases with the increase in the scan numbers. However, when a certain number of scans is reached, the depth will not increase further. This study serves as a valuable research foundation for the femtosecond laser processing of silicon nitride ceramic materials.

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