Elastic Scattering of Electrons by Molecules

Csanak, G.; Cartwright, D. C.; Srivastava, Santosh K.; Trajmar, S.

doi:10.1016/b978-0-12-174401-4.50006-7

Cited by 9 publications

(5 citation statements)

References 378 publications

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“…General reviews of the basic binary collision cross section data cover a wide range of references and molecules (Kieffer 1973, Csanak et al 1984, Maerk 1984, Trajmar and Cartwright 1984, Winstead and McKoy 1996, Zecca et al 1996, Brunger and Buckman 2002, Brunger et al 2003a, 2003c. General older reviews of the cross section sets that involved some level of analysis of the transport data are well known and still quite useful (Huxley and Crompton 1974, Hayashi 1981, Hunter and Christophorou 1984 and the continuously updated data of Phelps ftp://jila.colorado.edu/collision data/ electronneutral/electron.txt).…”

Section: Examples Of the Recently Obtained Electron Scattering Cross ...mentioning

confidence: 99%

Measurement and interpretation of swarm parameters and their application in plasma modelling

Petrović¹,

Dujko²,

Marić³

et al. 2009

J. Phys. D: Appl. Phys.

220

208

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In this review paper, we discuss the current status of the physics of charged particle swarms, mainly electrons, having plasma modelling in mind. The measurements of the swarm coefficients and the availability of the data are briefly discussed. We try to give a summary of the past ten years and cite the main reviews and databases, which store the majority of the earlier work. The need for reinitiating the swarm experiments and where and how those would be useful is pointed out. We also add some guidance on how to find information on ions and fast neutrals. Most space is devoted to interpretation of transport data, analysis of kinetic phenomena, and accuracy of calculation and proper use of transport data in plasma models. We have tried to show which aspects of kinetic theory developed for swarm physics and which segments of data would be important for further improvement of plasma models. Finally, several examples are given where actual models are mostly based on the physics of swarms and those include Townsend discharges, afterglows, breakdown and some atmospheric phenomena. Finally we stress that, while complex, some of the results from the kinetic theory of swarms and the related phenomenology must be used either to test the plasma models or even to bring in new physics or higher accuracy and reliability to the models.

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Section: Examples Of the Recently Obtained Electron Scattering Cross ...mentioning

confidence: 99%

Measurement and interpretation of swarm parameters and their application in plasma modelling

Petrović¹,

Dujko²,

Marić³

et al. 2009

J. Phys. D: Appl. Phys.

220

208

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“…1 Cross sections are also calculated considering an interaction of a single electron with a single target molecule. 2 However, in a variety of applications, such as plasma chemistry, 3 radiation chemistry, 4,5 and biology, 6 beam-and photon-induced surface chemistry, 7-11 space planetology, 12 and dielectric aging, 13 low-energy electron interactions and reactions occur under much more complex collision conditions. Under these conditions, electron scattering and attachment cross sections depend on the presence of neighboring atoms and/or molecules which can considerably modify single collision processes.…”

Section: Introductionmentioning

confidence: 99%

Electron attachment to CF3Cl and CH3Cl on the surface and in the bulk of solid Kr

Nagesha

Fabrikant

Sanche

2001

The Journal of Chemical Physics

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The formation of stable anions induced by the impact of 0–1.6 eV electrons on CF3Cl and CH3Cl condensed at the surface, and embedded within the bulk of solid Kr is investigated by measuring charging of the doped Kr films. Effects of the Pt substrate and under- and over-layer coverage of these molecules on the dissociative electron attachment and stable anion formation (SAF) are studied in detail by varying the film thickness and the position of the molecules within the film. Due to recent advances, we provide new and more reliable values of the absolute cross sections, σSAF, for SAF. σSAF reaches a maximum of 2.1×10−16 cm2 at 0.6 eV for CF3Cl embedded in solid Kr; for CH3Cl, this maximum is ∼10−16 cm2 at 0.2 eV. These values correspond to an enhancement of factors of 5 and 10, respectively, relative to σSAF measured at the surface. The electron energy dependence of σSAF is also evaluated theoretically from calculations performed with the R-matrix formalism extended to include the influence of condensed-matter environments. By incorporating into the theory the band structure of the solid and different values of the polarization induced into the medium by electron capture, we study the effect of these parameters on σSAF. Comparison between experimental and theoretical σSAF’s allows us to analyze the gas-phase parameters that must be modified to generate condensed-phase cross sections from gas-phase data and to discuss the effect of phenomena which are absent in the gas-phase (e.g., caging).

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“…For this process the electrons change direction without loss of energy. In this study, the cross sections are taken from the experimental data of Csanak [33].…”

Section: Elastic Scatteringmentioning

confidence: 99%

A model of capacitively coupled radio-frequency methane/hydrogen plasmas for III-V semiconductor etching applications

Layberry

Wroński

Pearce

et al. 1999

J. Phys. D: Appl. Phys.

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A model has been developed which follows electrons and ions through assumed time varying potentials in a radio-frequency methane/hydrogen plasma. The system modelled is relevant to a low-pressure (10-90 mTorr) plasma used in the etching of GaAs surfaces. To understand the etching process, a knowledge of the flux and energy distributions of all species at the surface is required and as a first stage it is necessary to derive the spatial ionization distribution function. Inelastic and elastic collisions with neutral gas molecules are included in the model and the results give realistic electron energy distribution functions (EEDFs). These EEDFs are found to be insensitive to the inclusion of rotational modes of excitation, but vary significantly when vibrational modes of excitation are included. The EEDF is seen to change greatly with spatial position between the electrodes. Results also suggest that the form of the spatial ionization distribution function is identical for all ion species, though different in magnitude. Ion fluxes predicted at the anode are in broad agreement with experiment and are most affected by the ionization cross sections used in the simulation. Neutral fluxes to the surface are seen to make a major contribution to the particle flux, especially at the higher pressures. The secondary electron emission coefficient, though having a significant effect on the electron energy distribution function, has little effect on the mass distribution of the flux deposition on the substrate surface.

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Elastic Scattering of Electrons by Molecules

Cited by 9 publications

References 378 publications

Measurement and interpretation of swarm parameters and their application in plasma modelling

Measurement and interpretation of swarm parameters and their application in plasma modelling

Electron attachment to CF3Cl and CH3Cl on the surface and in the bulk of solid Kr

A model of capacitively coupled radio-frequency methane/hydrogen plasmas for III-V semiconductor etching applications

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