Electric Characteristics of Diamond Film Synthesized by Combustion Flame

Okumura, Yukihiko; Kanayama, Kouichi; Tabaru, Masaya; Kawabata, Shiro

doi:10.1299/kikaib.72.1073

Cited by 1 publication

(5 citation statements)

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“…In a previous report (5) , we showed that the incorporation of amorphous carbon (impurities) into synthesized diamond films can be optimally decreased for the case when φ = 2.55 for the C 2 H 2 /O 2 premixed gas. Consequently, in this study, diamond synthesis was carried out for φ = 2.55 when the T sub values were 700°C, 750°C, 800°C, and 850°C.…”

Section: Resultsmentioning

confidence: 85%

“…As reported in a previous paper (5) , the impedance and dielectric characteristics were measured using an impedance analyzer (Agilent 4294A). When an AC electric field is applied to a dielectric, a portion of the electric energy is lost as heat.…”

Section: Measurement Of Dielectric Characteristics (Ac Characteristics)mentioning

confidence: 99%

“…Since carbon (C) is a group-IV element, like silicon (Si) and gallium (Ga), and forms a crystal with a wide bandgap, its applications in diode and power semiconductor elements have been extensively studied (2)- (4) . In addition, the applications to elements that operate stably in a microchip (2), (3) placed in harsh environments and to capacitors (in the frequency band of 10 2 to 10 8 Hz (5) )…”

Section: Introductionmentioning

confidence: 99%

“…Merely few researchers have referred specifically to the electrical characteristics and physical qualities of the synthesized films. Therefore, we aim to reveal the electrical characteristics of diamond films synthesized by combustion flames (5) . In this report, we investigate the DC characteristics (electrical resistivity) in addition to the AC characteristics (dielectric characteristics (5) ).…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, we aim to reveal the electrical characteristics of diamond films synthesized by combustion flames (5) . In this report, we investigate the DC characteristics (electrical resistivity) in addition to the AC characteristics (dielectric characteristics (5) ). We discuss the relationship between the physical qualities in terms of structural evaluation and electrical characteristics and describe a method of synthesizing diamond films with superior electrical characteristics.…”

Section: Introductionmentioning

confidence: 99%

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Effect of Synthesis Condition on Electrical Characteristic of Diamond Film Produced by C2H2/O2 Combustion Flame

Okumura

Kanayama

Teraki

2009

JTST

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In this study, we attempted to clarify the electrical characteristics of diamond films synthesized by combustion flame and consequently synthesizing a suitable diamond film for use in electronic device applications. When the film contains amorphous carbon, the electrical resistivity (volume resistivity) decreases, i.e., the electrical characteristics of the diamond film worsen. To decrease the content of amorphous carbon in the diamond film, we utilized methods to detect two parameters: optimal equivalent ratio and optimal substrate temperature. These methods can decrease the amount of amorphous carbon effectively, thereby systematically changing the factors influencing the optimal synthesis for improving the film's electrical characteristics. We have successfully developed a method for producing high-quality diamond films with excellent electrical characteristics and high electrical resistivity (10 10 to 10 13 Ωm) at room temperature.

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Section: Resultsmentioning

confidence: 85%

Section: Measurement Of Dielectric Characteristics (Ac Characteristics)mentioning

confidence: 99%