Electric field measurements in the sheath of an argon rf discharge by probing with microparticles under varying gravity conditions

Beckers, JL Jozef; Stoffels, WW Winfred; Kroesen, G.M.W.; Ockenga, T.; Wolter, Matthias; Kersten, Holger

doi:10.1109/plasma.2010.5534165

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Particles As Electrostatic Probes In a Plasma Sheath1

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2011

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“…Consequently, the electric field and the particle charge can be determined as function of the position in the sheath. The experimental details are described elsewhere [5]. 4 shows CCD camera images of one layer of microparticles (r = 5.1 μm) confined in the plasma sheath demonstrating decreasing particle height with increasing values of gravity acceleration.…”

Section: Particles As Electrostatic Probes In a Plasma Sheathmentioning

confidence: 99%

Microparticles as Plasma Diagnostic Tools

Maurer

Schneider

Wolter

et al. 2011

Contrib. Plasma Phys.

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An interesting aspect in the research of complex (dusty) plasmas is the experimental study of the interaction of microparticles with the surrounding plasma for diagnostic purposes. Local electric fields can be determined from the behavior of particles in the plasma, i.e. particles may serve as electrostatic probes. From particle trajectories, also the determination of momentum flux in beams is possible, and the particles serve as force probes. Recently, temperature sensitive features of particular phosphors were utilized for measuring the surface temperature of microparticles confined in the sheath of a rf plasma. The experiments were performed under variation of gas pressure and rf power of the process plasma and offer a promising approach for the improvement of process plasmas and the understanding of plasma-particle interaction.

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Section: Particles As Electrostatic Probes In a Plasma Sheathmentioning

confidence: 99%