2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2021
DOI: 10.1109/transducers50396.2021.9495561
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Electric Field Sensor With Stabilized Interferometric Readout

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“…The transducer comprised a stationary and a moving part—the latter is connected to the stationary part at two sides, enabling an out-of-plane rotary displacement. When alternating charges reach the gold areas, due to the electric field E , the transducer will start oscillating, moving the laser mirror of the interferometer system [ 18 ].…”
Section: Methodsmentioning
confidence: 99%
“…The transducer comprised a stationary and a moving part—the latter is connected to the stationary part at two sides, enabling an out-of-plane rotary displacement. When alternating charges reach the gold areas, due to the electric field E , the transducer will start oscillating, moving the laser mirror of the interferometer system [ 18 ].…”
Section: Methodsmentioning
confidence: 99%