Electric gradient force drive mechanism for novel microscale all-dielectric gyroscope

Effect of structural anisotropy on anchor loss mismatch and predicted case drift in future micro-Hemispherical Resonator Gyros

“…1). Micro-HRGs and similar emerging axisymmetric 3D MEMS structures have garnered much interest [1][2][3][4][5][6][7][8][9], among other reasons, due to their potential for whole angle (WA) operation, side-stepping the need to integrate the gyro rate signal and the conversion of rate white noise into angle random walk. However, since the standing wave vibration pattern of the micro-HRG can be projected onto its two corresponding orthogonal but otherwise ideally-degenerate vibration eigenmodes, if one of these eigenmodes has a smaller coefficient of damping, the standing wave pattern will tend to align itself with this eigenmode as the other decays faster in amplitude, resulting in an apparent drift relative to the case [10][11][12].…”