Abstract-The nitrides of high entropy alloys, (TiZrAlYNb)N, fabricated by cathodic vacuum arc evapora tion are studied with electron microscopy, atomic force microscopy, laser scanning microscopy; energy dis persive X ray analysis, X ray phase analysis, time of flight secondary ion mass spectrometry; and hardness measurements. It is found that the deposition parameters influence the structure, surface morphology, ele ment distribution, and mechanical properties. The structural-phase state of the coatings before and after the ion implantation of heavy negative gold ions Au -are compared.