Breakdown sites in multicrystalline Si solar cells have been studied by reverse-bias electroluminescence, electron beam induced current (EBIC) and laser beam induced current (LBIC), and Energy Dispersive X-Ray Spectroscopy methods. In the breakdown sites revealed by EL at small reverse bias (∼5 V), the enhanced aluminum and oxygen concentration is revealed. Such breakdowns can be located inside the depletion region because they are not revealed by the EBIC or LBIC methods. Breakdowns revealed by EL at larger bias correlate well with extended defects in the EBIC and LBIC images.