2012
DOI: 10.1007/s10832-012-9698-3
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Electrical and memory window properties of Sr0.8-xBaxBi2.2Ta2-yZryO9 ferroelectric gate in metal-ferroelectric-insulator-semiconductor structure

Abstract: Electrical characteristics of Sr 0.8-x Ba x Bi 2.2 Ta 2-y Zr y O 9 ferroelectric films grown on HfO 2 /Si wafers by sol-gel spin coating technique were investigated from the viewpoint of application as ferroelectric gates in metal-ferroelectricinsulator-semiconductor (MFIS) stacks. It was observed that the leakage current density level was 10 -8 A/cm 2 under 14 V for moderate doping ratio. Determined memory windows from C-V characteristics of Sr 0.8 Bi 2.2 Ta 2 O 9 (SBT) and Sr 0.8-x Ba x Bi 2.2 Ta 2-y Zr y O … Show more

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Cited by 14 publications
(3 citation statements)
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“…Once the gate dielectric constant in the MFIS structure is much greater than that of the insulator layer, most of the applied voltage drop occurs across the thin buffer layer which results in a gate ferroelectric thin film material having a great depolarization field, but not enough electric field to switch. Besides low permittivity, the gate ferroelectric film requires a relatively low remanent polarization (P r ) of around 1 µC cm −2 to match the requisite charge for channel conductivity controlling in the memory process [8]. Hence, the key parameters of ferroelectric thin films for 1T-type FeRAMs are quite small dielectric constant (ε r ) and remanent polarization (P r ) around 1 µC cm −2 as discussed by the related researchers [9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Once the gate dielectric constant in the MFIS structure is much greater than that of the insulator layer, most of the applied voltage drop occurs across the thin buffer layer which results in a gate ferroelectric thin film material having a great depolarization field, but not enough electric field to switch. Besides low permittivity, the gate ferroelectric film requires a relatively low remanent polarization (P r ) of around 1 µC cm −2 to match the requisite charge for channel conductivity controlling in the memory process [8]. Hence, the key parameters of ferroelectric thin films for 1T-type FeRAMs are quite small dielectric constant (ε r ) and remanent polarization (P r ) around 1 µC cm −2 as discussed by the related researchers [9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Barium strontium titanate (Ba 1-x Sr x TiO 3 , abbreviated as BST) and strontium barium niobate (Sr x Ba 1-x Nb 2 O 6 , abbreviated as SBN) have attracted much attention from the view of fundamental and application. They exhibit a great variety of excellent pyroelectric, dielectric and faster response time of infrared radiation properties [1,2] . In spite of their good properties, there are some restrictions in applications, for example difficult synthesis and costly installations for SBN single crystal, large grain size and abnormal grain growth for polycrystalline SBN ceramics, high raw materials cost for SBN thin films [3][4][5] .…”
Section: Introductionmentioning
confidence: 99%
“…With an increase in light intensity, a greater number of electrons will possess sufficient energy to overcome the greater barrier. As a result, the Φ b will increase in proportion to the density of illumination and the bias voltage[25][26][27][28][29]. Additionally, there is a drop in the device's saturation current when it is illuminated.…”
mentioning
confidence: 99%