2019
DOI: 10.1007/s11090-019-10031-8
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Electrical and Optical Characterization of Acetylene RF CCP for Synthesis of Different Forms of Hydrogenated Amorphous Carbon Films

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Cited by 5 publications
(4 citation statements)
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“…Within the RF-ICP discharge, it is primarily the electrons that play a pivotal role in driving the excitation and ionization processes occurring in the discharge; this is because only electrons can swiftly navigate the rapidly changing electric field. In contrast, ions within the RF discharge are less influential and do not significantly contribute to the RF plasma discharge due to their limited mobility [66]. The high-frequency magnetic field in RF-ICP serves as the driving force for accelerating electrons, elevating their energy levels significantly.…”
Section: Resultsmentioning
confidence: 99%
“…Within the RF-ICP discharge, it is primarily the electrons that play a pivotal role in driving the excitation and ionization processes occurring in the discharge; this is because only electrons can swiftly navigate the rapidly changing electric field. In contrast, ions within the RF discharge are less influential and do not significantly contribute to the RF plasma discharge due to their limited mobility [66]. The high-frequency magnetic field in RF-ICP serves as the driving force for accelerating electrons, elevating their energy levels significantly.…”
Section: Resultsmentioning
confidence: 99%
“…Table 1 shows the wavelengths, excitation energy for the upper excited level (Ek), transition probability (Aik), and statistical weight (gk) for the upper excited level taken from NIST for every line that appeared. Due to their higher mobility relative to ions and ability to follow the electric field, electrons in RF plasma discharge oversee the ionization and excitation processes [22,23]. Figure 3 (a, b) displays the variation of the intensity of ArI lines with the RF power at gas flow rates of 2 and 4 L/min, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…This is because only electrons can swiftly navigate the rapidly changing electric field. In contrast, ions within the RF discharge are less influential and do not significantly contribute to the RF plasma discharge due to their limited mobility [50]. The high-frequency magnetic field in RF-ICP serves as the driving force for accelerating electrons, elevating their energy levels significantly.…”
Section: Resultsmentioning
confidence: 99%