We investigate the temperature dependence of current-voltage and spectral response characteristics of a 4H-SiC metal-semiconductor-metal (MSM) ultraviolet photodetector in the temperature range from room temperature to 800 K with two-dimensional (2D) numerical simulator ISE-DESSIS. It is found that the dark current and photocurrent increase with the increasing temperature. For the range of 500-800 K, the dark current increases by nearly a factor 3.5 every 150 K larger than that of photocurrent, leading to a negative effect on photodetector current ratio (PDCR). Nevertheless, the PDCR is still greater than 200 even at 800 K, which exhibits the excellent thermal stability. In addition, the responsivity has an unsymmetrical trend. As temperature rises, it is clear that a remarkable red-shift of 12 nm occurs and overall responsivity is enhanced for longer wavelength. While the short-wavelength response remains relatively independent of temperature. The mechanism of indirect and direct band absorption transition is responsible for temperature-dependent spectrum distribution. These findings provide a significant insight on the design of the MSM detector operated at elevated temperature. silicon carbide, ultraviolet photodetector, temperature dependence
Citation:Chen B, Yang Y T, Xie X R, et al. Analysis of temperature-dependent characteristics of a 4H-SiC metal-semiconductor-metal ultraviolet photodetector. Chin Sci Bull, 2012Bull, , 57: 44274433, doi: 10.1007 In despite of having an indirect bandgap, silicon carbide (SiC) has emerged as an appropriate material for the fabrication of ultraviolet (UV)/visible optoelectronic devices over the last few years due to the available substrates [1], the lower defect density and a more mature process technology [2]. Typically, 4H-SiC based UV photodetectors achieve photosensitivity spectrum of 220-380 nm and peak responsivity at around 290 nm. Photodetectors based on Schottky contacts have an enhanced sensitivity to shorter wavelength radiation as well as a reduced response time as no minority carriers are involved [3]. Especially, the metalsemiconductor-metal (MSM) photodetectors possess potential merits of large device bandwidth, small intrinsic capacitance, and sub-nanosecond response time. Whilst the planar process of MSM detectors may be accomplished with as little as one photolithography step and allows their monolithic integration with other optical and electronic circuits [4]. Recent achievements include nano-structured MSM photodetector with high peak voltage [5], MSM solar-blind photodetector with fast rise and decay times of 10 ns and 150 ns [6], high responsivity MSM photodetector with 26000 A/W at 8 V bias via a carrier-trapping process [7]. More recently, MSM UV detectors exhibit UV-photo generated current to dark current ratio up to 1.34×10 8 with colloidal nanoparticles [8], realize a photocurrent gain around 40 at 2 V bias using CaF 2 as the insulator [9], and achieve a very low dark current density of 3.84 nA/cm 2 at 5 V bias based on sol-gel-derived TiO 2 f...