“…TiN is a promissing material because it can be used to cut tools wear-resistant coatings, diffusion barriers [2], photo-thermal solar energy conversion layer [3], semi-transparent contacts in solar cells [4] due to it possesses many interesting physical and chemical properties, such as high hardness, high melting point, high chemical stability, good electrical conductivity (around 30µΩ·cm ), high optical reflectivity (its colors varying from gold to dark brown) that are beneficial for applications in high temperature heterogeneous catalysis [5,6] and so on. What is more, TiN has a high reflectance in the infrared (IR) range and high transmittance in the visible range when the thickness of the films is less than 30 nm, So it is usually used as optical selective coatings [7,8]. The electrical and optical properties of TiN films depend strongly on composition (Ti/N ratio), and structure of, which are established by the preparation method and process conditions [9,10].…”