Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Wei, Aixiang; Ge, Zhiqiang; Zhao, Xianghui; Liu, J.; Zhao, Yuyan

doi:10.1016/j.jallcom.2011.08.019

Cited by 28 publications

(17 citation statements)

References 22 publications

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“…350 or 450 1C, leads to a shift of the edge to about 272 nm, which is expected for Ta 2 O 5 . 27,28 This effect is due to the removal of hydroxyl groups at the surface of the oxide particles, which were also visible in the before mentioned IR spectra of powders, which were heated at different temperatures. XPS spectra (Fig.…”

Section: Synthesis Of Stable Tantalum Oxide Nanoparticle Dispersionsmentioning

confidence: 68%

A microwave molecular solution based approach towards high-κ-tantalum(v)oxide nanoparticles: synthesis, dielectric properties and electron paramagnetic resonance spectroscopic studies of their defect chemistry

Hoffmann

Kaloumenos

Spiehl

et al. 2015

Phys. Chem. Chem. Phys.

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Stable dispersions of tantalum oxide nanoparticles are accessible from solutions of tantalum(V) complexes with a mixed malonato and alkanolato ligand sphere in ethoxyethanol by microwave processing. The malonato ligand is cleaved during decomposition and acetic acid or acetic acid esters are formed as derived from in situ spectroscopic studies. The solubility of the tantalum precursor and the obtained particle size therefrom depend strongly on the type of alkanolato ligand moiety. Dispersions of the molecular complexes possess good film forming properties. Films with low surface roughness can be obtained by spincoating. These exhibited a dielectric constant of about 15 and disruptive strengths above 1.5 MV cm(-1). The electrical measurements indicate that the presence of moisture is detrimental with respect to the dielectric performance of the films. After removal of the solvent from the suspensions of the nanoparticles, the residue can be redispersed in aprotic solvents. The particles can be isolated therefrom by precipitation with pentane. XRD and HRTEM indicate that the material remains amorphous up to temperatures of 750 °C. XPS proved that only Ta2O5 is formed as lower oxidation states of Ta cannot be detected. A detailed EPR study allows us to gain insight into the surface defect chemistry. Multiple types of oxygen vacancies exist at the surface of the Ta2O5 particles which are influenced by additional calcination and annealing in a vacuum.

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Section: Synthesis Of Stable Tantalum Oxide Nanoparticle Dispersionsmentioning

confidence: 68%

A microwave molecular solution based approach towards high-κ-tantalum(v)oxide nanoparticles: synthesis, dielectric properties and electron paramagnetic resonance spectroscopic studies of their defect chemistry

Hoffmann

Kaloumenos

Spiehl

et al. 2015

Phys. Chem. Chem. Phys.

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show abstract

“…Tato technika pracuje za teplot výrazně nižších než metoda CVD (150-500 °C), ale rovněž výrazně nižšího tlaku (10 -2 až 10 -5 Pa). Vrstvy tvořené metodami na principu PVD mají obecně nižší vnitřní pnutí a umožňuje nanášet celou řadu materiálů [21,22].…”

Section: Pvd (Physical Vapor Deposition)unclassified

Hydrogen embrittlement of tantalum and tantalum coatings

Pokorný¹,

Kouřil²,

Martínek³

et al. 2012

Koroze a Ochrana Materiálu

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“…It is well established that amorphous materials give rise to “broadened structures” at low angles. These features are associated with the local chemical environment, and the greater the atomic weight is (and therefore the scattering cross-section), the higher the GIXRD intensity is [ 11 ]. Thus far, diffractograms of amorphous samples were employed to establish their non-crystalline nature; however, no exploitation of this technique has been carried out to obtain quantitative information concerning the short-range chemical environment.…”

Section: Introductionmentioning

confidence: 99%

Capabilities of Grazing Incidence X-ray Diffraction in the Investigation of Amorphous Mixed Oxides with Variable Composition

et al. 2022

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X-ray Diffraction has been fully exploited as a probe to investigate crystalline materials. However, very little research has been carried out to unveil its potentialities towards amorphous materials. In this work, we demonstrated the capabilities of Grazing Incidence X-ray Diffraction (GIXRD) as a simple and fast tool to obtain quantitative information about the composition of amorphous mixed oxides. In particular, we evidenced that low angle scattering features, associated with local structure parameters, show a significant trend as a function of the oxide composition. This evolution can be quantified by interpolating GIXRD data with a linear combination of basic analytical functions, making it possible to build up GIXRD peak-sample composition calibration curves. As a case study, the present method was demonstrated on Ta2O5–SiO2 amorphous films deposited by RF-magnetron sputtering. GIXRD results were validated by independent measurement of the oxide composition using Rutherford Backscattering Spectrometry (RBS). These materials are attracting interest in different industrial sectors and, in particular, in photovoltaics as anti-reflection coatings. Eventually, the optical properties measured by spectroscopic ellipsometry were correlated to the chemical composition of the film. The obtained results highlighted not only a correlation between diffraction features and the composition of amorphous films but also revealed a simple and fast strategy to characterize amorphous thin oxides of industrial interest.

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Cited by 28 publications

References 22 publications

A microwave molecular solution based approach towards high-κ-tantalum(v)oxide nanoparticles: synthesis, dielectric properties and electron paramagnetic resonance spectroscopic studies of their defect chemistry

A microwave molecular solution based approach towards high-κ-tantalum(v)oxide nanoparticles: synthesis, dielectric properties and electron paramagnetic resonance spectroscopic studies of their defect chemistry

Hydrogen embrittlement of tantalum and tantalum coatings

Capabilities of Grazing Incidence X-ray Diffraction in the Investigation of Amorphous Mixed Oxides with Variable Composition

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