2008
DOI: 10.1088/0022-3727/42/1/015206
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Electrical and spectroscopic characterizations of a low pressure argon discharge created by a broad-band helical coupling device

Abstract: This paper presents the spatial characterization of Ar plasma induced by a broad-band helical coupling device at low pressure (15 Pa). The electric field analysis outside the helix but within the coupling device is carried out by electrostatic probe for several excitation frequencies ranging from 13.56 to 433 MHz. The results prove that this helical cavity behaves as a slow-wave plasma source. At 13.56 MHz, the spatial investigation of electric field with and without plasma led to show a flat profile along the… Show more

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Cited by 14 publications
(22 citation statements)
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“…The experimental apparatus was described in our previous papers [1][2][3]. Furthermore, extensive details concerning our helical broad-band coupling device have been reported earlier [10].…”
Section: Methodsmentioning
confidence: 99%
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“…The experimental apparatus was described in our previous papers [1][2][3]. Furthermore, extensive details concerning our helical broad-band coupling device have been reported earlier [10].…”
Section: Methodsmentioning
confidence: 99%
“…In fact, the electric field component in the unloaded cavity working at 13.56 MHz is constant along the helix structure while the density profiles of the main emitting species (argon and nitrogen) present a minimum situated in the middle of the cavity and two maxima located at the positions where the power is transmitted to the gas and at the end of the helix. This hollow shaped density profile is due to the presence of a non-linear phenomenon in the discharge, which is related to bifurcations into an unstable uniform steady state as a new state with sinusoidal variations [2]. The observed profile remains whatever the N 2 -Ar mixture (0 %Ar 95) and for a wide gas pressure range .…”
Section: Introductionmentioning
confidence: 91%
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“…The present study deals coronal equilibrium in which electron impact excitation is the forward process and spontaneous decay is the reverse process and Boltzmann plot technique gives excitation temperature T exc rather than electron temperature [33]. To obtain T , exc Ar I emission lines are used by assuming that upper energy levels of these lines populate following Boltzmann distribution.…”
Section: Lp Measurementsmentioning
confidence: 99%
“…In this respect, this analysis philosophy is similar to the doubleprobe analysis, which gives the electron temperature of the rather high energy part around the space potential of the plasma. 52,53) Figure 5 indicates that the electron temperature T e = 0.29 eV if the Maxwellian EEDF is assumed, and T e = 0.79 eV if the Druyvesteyn EEDF is assumed as the best fitting parameter. It should be noted that the latter EEDF can fit the experimentally obtained spectrum up to the longer wavelength region.…”
Section: Continuum Spectrum Analysismentioning
confidence: 99%