Electrical and stability properties and ultrasonic microscope characterisation of low temperature co-fired ceramics resistors

Dziedzic, Andrzej; Gołonka, Leszek; Kita, Jarosław; Thust, Heiko; Drüe, Karl-Heinz; Bauer, Rudolf; Rebenklau, Lars; Wolter, Klaus‐Jürgen

doi:10.1016/s0026-2714(01)00004-x

Cited by 11 publications

(10 citation statements)

References 6 publications

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“…The discharge elements used in the device were constructed using sheets of DuPont 951 low-temperature cofired ceramic (LTCC), which is robust to plasma bombardment [17] and is capable of being fabricated into a variety of shapes with embedded metal electrodes and resistors [18]. The advantages to using LTCC include its good thermal conductivity, with sintering temperatures below 900 • C, and the ability for it to be stacked into layers containing conductive internal and external metal traces.…”

Section: A Device Overviewmentioning

confidence: 99%

Fabrication and Performance of a Multidischarge Cold-Atmospheric Pressure Plasma Array

Cornell

White

Croteau

et al. 2021

IEEE Trans. Plasma Sci.

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Cold atmospheric-pressure plasma (CAP) has been shown to kill bacteria and remove biofilms. Here, we report the development of a unique CAP array device consisting of a parallel stack of eight linear-discharge plasma elements that create a ∼5-cm 2 (2.4 cm × 2 cm) treatment area. The CAP device is fabricated from low-temperature cofired ceramic (LTCC) layers to create 24-mm-long linear-discharge channels (500-μm gap) with embedded opposing silver metal electrodes. A 20-kHz ac voltage (0.5-5 kV) applied to the electrodes generates an Ar/O 2 plasma between the plates, with the gas flow directing the reactive species toward the biological sample (biofilms and so on) to affect the antimicrobial treatment. External ballast resistors were used to study discharge uniformity in the stacked array elements, and internal thick film ballast resistors (≈150 k) were developed to create a fully integrated device. Typical element discharge currents were 1-2.5 mA with the total array current tested at 20 mA to provide optimal device uniformity. The plasma discharge was further shown to produce reactive hydrogen peroxide and exert antimicrobial effects on Pseudomonas biofilms and Salmonella contaminated eggshell samples, with >99% of the bacterial cells killed with less than 60 s of plasma exposure.Index Terms-Antimicrobial, biofilms, cold atmosphericpressure plasma (CAP), reactive oxygen species. I. INTRODUCTIONM ICROBIAL biofilms and pathogenic contaminants are difficult to remove from surfaces and create significant issues in medical settings [1], [2]. Outside healthcare settings, microbial biofilms are also a serious concern in the food processing industry, where biofilms and microbial

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Section: A Device Overviewmentioning

confidence: 99%

Fabrication and Performance of a Multidischarge Cold-Atmospheric Pressure Plasma Array

Cornell

White

Croteau

et al. 2021

IEEE Trans. Plasma Sci.

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“…1. The buried elements are formed as planar (2D) or three -dimensional (3D) [14,15]. Their basic electrical properties are similar.…”

Section: Passive Componentsmentioning

confidence: 99%

“…Resistors. The electrical properties of the buried and the surface resistors are presented in [14,16,17]. The buried resistors can be trimmed by laser through a special hole in the upper foil, or through one thin layer.…”

Section: Passive Componentsmentioning

confidence: 99%

Low‐temperature Cofired Ceramic (Ltcc) Technology

Sabban¹

2016

Wideband RF Technologies and Antennas in Microwave Frequencies

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“…Some of the results for the resistor/LTCC combinations and the influences on the electrical characteristics can be found in. [21][22][23][24] Thick-film resistors with high TCRs are of interest as temperature sensors in MCM-Cs as well as in MEMS (Micro Electro Mechanical Systems). [25][26][27][28] The thick-film PTC thermistors were developed for firing on alumina substrates.…”

Section: Introductionmentioning

confidence: 99%

Thick-film PTC thermistors and LTCC structures: The dependence of the electrical and microstructural characteristics on the firing temperature

Hrovat¹,

Belavič²,

Kita³

et al. 2007

Journal of the European Ceramic Society

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The electrical and microstructural characteristics of 1 k /sq thick-film thermistors with high positive temperature coefficients of resistivity, i.e., PTC 5093 (Du Pont) fired either on "green" LTCC (low-temperature co-fired ceramics) substrates or buried within LTCC structures, were evaluated. The thermistors were fired at different temperatures to study the influence of firing temperature on the electrical characteristics. The noise indices of the surface resistors fired at temperatures between 850 • C and 950 • C were very low, around −30 dB. The TCRs of the evaluated PTC thermistors were over 3000 × 10 −6 /K. The dependence of the resistivity on the temperature between −25 • C and 125 • C was linear, with the values of R 2 being better than 0.9999, regardless of the processing conditions. These results show that PTC thermistors co-fired on LTCC substrates can be used for temperature sensors in MCM-Cs as well as in MEMS structures. However, when the thermistors were buried in the LTCC substrates, the LTCC structures delaminated during firing and blisters formed, leading to high sheet resistivities and high noise indices. This delamination is attributed to the different sintering rates of the PTC and LTCC materials as well as to the expansion of the air bubbles captured in the viscous glass of the PTC material.

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Electrical and stability properties and ultrasonic microscope characterisation of low temperature co-fired ceramics resistors

Cited by 11 publications

References 6 publications

Fabrication and Performance of a Multidischarge Cold-Atmospheric Pressure Plasma Array

Fabrication and Performance of a Multidischarge Cold-Atmospheric Pressure Plasma Array

Low‐temperature Cofired Ceramic (Ltcc) Technology

Thick-film PTC thermistors and LTCC structures: The dependence of the electrical and microstructural characteristics on the firing temperature

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