Electrical and X-ray Photoelectron Spectroscopy Studies of Ti/Al/Ti/Au Ohmic Contacts to AlGaN/GaN

OKADA, Hiroshi; FUKINAKA, Mao; AKIRA, Yoshiki

doi:10.1587/transele.2023fus0002

IEICE Trans. Electron.

2024

DOI: 10.1587/transele.2023fus0002

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Electrical and X-ray Photoelectron Spectroscopy Studies of Ti/Al/Ti/Au Ohmic Contacts to AlGaN/GaN

Hiroshi OKADA,

Mao FUKINAKA,

Yoshiki AKIRA

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Electrical and X-ray Photoelectron Spectroscopy Studies of Ti/Al/Ti/Au Ohmic Contacts to AlGaN/GaN

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