Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis

Zimmermann, Bernd; Lücklum, Ralf; Hauptmann, P.; Rabe, Jens; Büttgenbach, S.

doi:10.1016/s0925-4005(01)00567-6

Cited by 74 publications

(44 citation statements)

References 20 publications

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“…• The diameter of the electrodes should be generally smaller than 40% of the resonator diameter. • The separation of unwanted spurious modes from the resonance frequency can be achieved by limiting the diameter of electrodes as function of the resonator thickness as described in [56].…”

Section: Losses In Piezoelectric Resonatorsmentioning

confidence: 99%

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High-temperature piezoelectric crystals and devices

Fritze

2011

J Electroceram

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Conventional piezoelectric materials such as quartz are widely used as high precision transducers and sensors based on bulk acoustic waves. However, their operation temperature is limited by the intrinsic materials properties to about 500 • C. High-temperature applications are feasible by applying materials that retain their piezoelectric properties up to higher temperatures. Here, langasite (La 3 Ga 5 SiO 14 ) and compounds of the langasite family are the most promising candidates, since they are shown to exhibit bulk acoustic waves up to at least 1400 • C. The mass sensitivity of langasite resonators at elevated temperatures is about as high as that of quartz at room temperature. Factors limiting potential use of those crystals include excessive conductive and viscous losses, deviations from stoichiometry and chemical instability. Therefore, the objective of this work is to identify the related microscopic mechanisms, to correlate electromechanical properties and defect chemistry and to improve the stability of the materials by e.g. appropriate dopants.Further application examples such as resonant gas sensors are given to demonstrate the capabilities of hightemperature stable piezoelectric materials. The electromechanical properties of langasite are determined and described by a one-dimensional physical model. Key properties relevant for stable operation of resonators are found to be shear modulus, density, electrical conductivity and effective viscosity. In order to quantify their impact on frequency and damping, a general-H. Fritze (B)

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Section: Losses In Piezoelectric Resonatorsmentioning

confidence: 99%

“…View and depth profile of a langasite membrane prepared by wet chemical etching fact can be explained by the ignorance of some design rules[56]. Diameters of 3 and 1.5 mm for the membrane and the electrode, respectively, are not the optimum.…”

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confidence: 99%

High-temperature piezoelectric crystals and devices

Fritze

2011

J Electroceram

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“…(18) Furthermore, the phase angle is also reduced to be very small even below 0° with the increased fundamental frequency and density-viscosity values. (13) To drive such a resonator, a two-stage transconductance-amplifier-(OPA660)-based oscillator circuit is designed, as shown in Fig. 2.…”

Section: Oscillator Circuitmentioning

confidence: 99%

“…The simple structure of the QCM and the development of a quartz micro-electromechanical system (MEMS) technique make it possible to achieve a miniaturized high-frequency QCM chip and resonator array. (13)(14)(15)(16) Recently, the fabrication and evaluation of a high-frequency fundamental QCM and the establishment of a portable flow-injection-based miniaturized QCM system have been reported in our previous publications. (17,18) The QCM system is composed of a microsyringe pump, a sample injector, a tailor-made flow cell, and a frequency monitoring tool.…”

Section: Introductionmentioning

confidence: 99%

Development of Portable Quartz Crystal Microbalance for Biosensor Applications

2016

Sensors and Materials

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Keywords: quartz crystal microbalance, flow injection analysis, high frequency, biosensorIn this work, we report a novel flow-injection-type portable quartz crystal microbalance (QCM) sensor utilizing a high-frequency (higher than 40 MHz) miniaturized QCM chip. The resonator chip is assembled in a novel three-layer flow cell, in which the top and bottom layers are used to fix the spring-pin leading electrodes and the middle layer is used to house the resonator chip. A two-stage operational transconductance-amplifier-(OPA660)-based oscillator circuit is developed to drive the QCM and measure the frequency shift. A low human IgG concentration of 1 ppm has been measured even using the simple physical adsorption antibody immobilization method, which indicates that the developed portable QCM sensor can be used as a biosensor in liquids.

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“…Consequently, oscillators are taken as alternative for sensor resonance frequency monitoring; the low cost of their circuitry as well as the integration capability and continuous monitoring are some features which make the oscillators to be the most common alternative for high resonance frequency QCM sensors. However, in spite of the efforts carried out to build oscillator configurations suitable for in-liquid applications (Barnes, 1991;Auge et al, 1994Auge et al, , 1995Chagnard et al, 1996;Paul & Beeler, 1998;Rodríguez-Pardo, 2004, 2006Wessendorf, 2001;Benes et al, 1999) the poor stability of high frequency QCM systems based on oscillators has prevented increasing the limit of detection despite the higher sensitivity reported (Rabe et al, 2000;Uttenthaler et al, 2000;Zimmermann et al, 2001;Sagmeister et al, 2009). …”

Section: Instrumentation Techniquesmentioning

confidence: 99%