Electrical characteristics and preparation of Pb(Zr/sub 0.5/TiO/sub 0.5/)O/sub 3/ ferroelectric films by spray pyrolysis

Koo, Horng-Show; Weng, George J.; Kawai, Takao; Ku, H.K.; Akasaka, Yumeno

doi:10.1109/imnc.2004.245798

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2010

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“…Many types of functional ceramic films, such as tin oxides, zinc oxides, titanium oxides, lead zirconium titanate, and barium strontium titanate, have been prepared by spray pyrolysis. [10][11][12][13] However, in these previous studies, metal chlorides or nitrates were generally used as metal sources and solvents. Hence, the fabricated film essentially contained a significant amount of halide and nitrate contaminations, which probably degraded their properties.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of BaTiO₃ Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

Wagata

Taniguchi

Gallage

et al. 2010

Journal of the American Ceramic Society

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This paper reports on the fabrication of barium titanate (BaTiO3) thin films using a precursor solution containing Ba and Ti alkoxides. l‐proline was used to prevent the precipitation of Ba and Ti alkoxides in a mixed solvent of ethanol and butylcarbitol under ambient conditions. Analysis of X‐ray diffraction and Raman spectra revealed that the as‐deposited amorphous film crystallized into a tetragonal BaTiO3 phase after annealing at 650°C in air. Scanning electron microscopic observations showed that the BaTiO3 film was free from cracks even after annealing and exhibited good adhesion to the substrate. Because the precursor solution developed was sufficiently stable in air, dot patterning of BaTiO3 was also performed using an inkjet system.

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Section: Introductionmentioning

confidence: 99%

Fabrication of BaTiO₃ Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

Wagata

Taniguchi

Gallage

et al. 2010

Journal of the American Ceramic Society

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Electrical characteristics and preparation of Pb(Zr/sub 0.5/TiO/sub 0.5/)O/sub 3/ ferroelectric films by spray pyrolysis

Cited by 1 publication

References 3 publications

Fabrication of BaTiO₃ Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

Fabrication of BaTiO₃ Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

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Electrical characteristics and preparation of Pb(Zr/sub 0.5/TiO/sub 0.5/)O/sub 3/ ferroelectric films by spray pyrolysis

Cited by 1 publication

References 3 publications

Fabrication of BaTiO3 Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

Fabrication of BaTiO3 Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

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Fabrication of BaTiO₃ Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route

Fabrication of BaTiO₃ Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route