Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell

Sobolewski, Mark A.

doi:10.1109/27.476490

Cited by 84 publications

(65 citation statements)

References 32 publications

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“…In this case, a large stray capacitance between the RF electrode and the grounded chamber walls affects the measurements of electric characteristics of the discharge considerably made with an external RF voltage-current probe (RF current amplitude I rf , phase shift angle ϕ between the RF voltage and current, and discharge impedance Z). In order to decrease the effect of the stray capacitance on electric measurements, Miller and co-workers [34], [35] and Sobolewski [25], [36] proposed to include an external shunt into the discharge circuit, thus removing a large displacement current and allowing to obtain more accurate values of the current I rf , phase shift angle ϕ, and discharge impedance Z.…”

Section: B Electrical Measurementsmentioning

confidence: 99%

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

Lisovskiy

Booth

Landry³

et al. 2007

IEEE Trans. Plasma Sci.

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Abstract-We report the measured extinction curves and current-voltage characteristics (CVCs) in several gases of RF capacitive discharges excited at 13.56 MHz in chambers of three different geometries: 1) parallel plates surrounded by a dielectric cylinder ("symmetric parallel plate"); 2) parallel plates surrounded by a metallic cylinder ("asymmetric confined"); and 3) parallel plates inside a much larger metallic chamber ("asymmetric unconfined"), similar to the gaseous electronics conference reference cell. The extinction curves and the CVCs show differences between the symmetric, asymmetric confined, and asymmetric unconfined chamber configurations. In particular, the discharges exist over a much broader range of RF voltages and gas pressures for the asymmetric unconfined chamber. For symmetric and asymmetric confined discharges, the extinction curves are close to each other in the regions near the minima and at lower pressure, but at higher pressure, the extinction curve of the asymmetric confined discharge runs at a lower voltage than the one for the discharge in a symmetric chamber. In the particular cases of an "asymmetric unconfined chamber" discharge or "asymmetric confined" one, the RF discharge experiences the transition from a "weak-current" mode to a "strong-current" one at lower RF voltages than is the case for a "symmetric parallel-plate" discharge.

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Section: B Electrical Measurementsmentioning

confidence: 99%

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

Lisovskiy

Booth

Landry³

et al. 2007

IEEE Trans. Plasma Sci.

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“…In the region to the left of the breakdown curve minimum we observe a turning point for which dU pr /dp = ∞ with the coordinates p = p t and U pr = U t.pr . At this point the electron drift velocity may be easily determined according to (8). For this we need to know only the width d of the inter-electrode gap and the frequency, f , of the RF field.…”

Section: Determination Of Electrode Voltagementioning

confidence: 99%

“…Miller [5,6] and Sobolewski [7,8] made large contributions to the development of correct methods of rf measurements. They proposed to include an external inductive shunt into the electric circuit, which tuning can compensate rf displacement current.…”

Section: Introductionmentioning

confidence: 99%

A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

Lisovskiy

Booth

Landry³

et al. 2006

Eur. Phys. J. Appl. Phys.

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Abstract. We propose a new technique for evaluating the RF voltage across the electrodes of low-pressure capacitively-coupled plasma reactors when direct measurements are not possible. It is based on determining the coordinates of the turning point in the RF breakdown curve and using known values of the electron drift velocity for the gas. The results are in good agreement with those obtained by direct measurements at the driven electrode. Furthermore it allows RF breakdown curves to be determined for different frequencies, giving results that are physically reasonable (coincidence of right-hand branches) and in agreement with other published results. The technique for determining RF voltage we proposed is valid when there is no discharge plasma between electrodes (e.g., before gas breakdown), as well as for negligibly small discharge currents (before extinction of the weak-current discharge mode).

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“…The ion transit time is determined from the three analytical IEDF models defined by equations (6), (7) and (8) using E from the measured IEDFs and V pp calculated from equation (3). The results of the ion flux calculations from (9), (10) and (11) are shown in figure 5.…”

Section: Ion Flux To the Electrodementioning

confidence: 99%

“…Voltage-current (VI) probes mounted on the power feed line have been shown to be a powerful noninvasive diagnostic [2][3][4][5][6][7]. They provide the user with a direct measurement of the excitation voltage and plasma current waveforms.…”

Section: Introductionmentioning

confidence: 99%

Ion energy distribution measurements in rf and pulsed dc plasma discharges

Gahan

Hayden

Scullin

et al. 2012

Plasma Sources Sci. Technol.

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A commercial retarding field analyzer is used to measure the time-averaged ion energy distributions of impacting ions at the powered electrode in a 13.56 MHz driven, capacitively coupled, parallel plate discharge operated at low pressure. The study is carried out in argon discharges at 10 mTorr where the sheaths are assumed to be collisionless. The analyzer is mounted flush with the powered electrode surface where the impacting ion and electron energy distributions are measured for a range of discharge powers. A circuit model of the discharge, in combination with analytical solutions for the ion energy distribution in radio-frequency sheaths, is used to calculate other important plasma parameters from the measured energy distributions. Radio-frequency compensated Langmuir probe measurements provide a comparison with the retarding field analyzer data. The time-resolved capability of the retarding field analyzer is also demonstrated in a separate pulsed dc magnetron reactor. The analyzer is mounted on the floating substrate holder and ion energy distributions of the impinging ions on a growing film, with 100 ns time resolution, are measured through a pulse period of applied magnetron power, which are crucial for the control of the microstructure and properties of the deposited films.

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Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell

Cited by 84 publications

References 32 publications

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

Ion energy distribution measurements in rf and pulsed dc plasma discharges

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