2013
DOI: 10.3126/kuset.v8i2.7322
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Electrical characterization of aluminum (Al) thin films measured by using four- point probe method

Abstract: This paper reports the results of electrical characterization of aluminum thin films. Uniform Al thin films were deposited by physical vapor deposition (PVD) technique on glass substrates. The electrical resistivity of the films as a function of film thickness was studied. These parameters have been measured by four-point probe method. The electrical resistivity was obtained by the measurement of current (in mA) and voltage in (mV) through the probe. The results showed that resistivity of the film decreases li… Show more

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Cited by 28 publications
(18 citation statements)
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“…With this experimental method a pure crystalline sample shows a high value of RRR, whereas a sample with a high concentration of defect and/or impurities gives low values of RRR. The ratio ρ 300 /ρ 4.2 can be substitute with R 300 /R 4.2 when the volume of the sample measured is little affected by the temperature, where ρ and 4 3,29 ± 0,72 118,13 ± 18,60 S 7 2,25 ± 0,78 92,08 ± 18,03 S 11 1,80 ± 0,80 68,83 ± 19,80 S 12 2,30 ± 0,75 96,42 ± 17,69 S 18 2,48 ± 0,70 101,71 ± 16,88 S 19 2,30 ± 0,70 93,55 ± 16,28 S 20 2,43 ± 0,55 99,78 ± 16,84 S 21 2,10 ± 0,58 91,02 ± 15,89…”
Section: Methodsmentioning
confidence: 99%
“…With this experimental method a pure crystalline sample shows a high value of RRR, whereas a sample with a high concentration of defect and/or impurities gives low values of RRR. The ratio ρ 300 /ρ 4.2 can be substitute with R 300 /R 4.2 when the volume of the sample measured is little affected by the temperature, where ρ and 4 3,29 ± 0,72 118,13 ± 18,60 S 7 2,25 ± 0,78 92,08 ± 18,03 S 11 1,80 ± 0,80 68,83 ± 19,80 S 12 2,30 ± 0,75 96,42 ± 17,69 S 18 2,48 ± 0,70 101,71 ± 16,88 S 19 2,30 ± 0,70 93,55 ± 16,28 S 20 2,43 ± 0,55 99,78 ± 16,84 S 21 2,10 ± 0,58 91,02 ± 15,89…”
Section: Methodsmentioning
confidence: 99%
“…An electrical resistance of the pellets was measured at room temperature using the four-point probe technique. The conductivity σ of the pallet is given by [21]-…”
Section: Electrical Conductivity Measurementmentioning
confidence: 99%
“…The electrical resistivity of paste prepared with different carbon blacks was measured by four probe method [10]. Different carbon blacks along with other traditional additives were mixed with lead oxide.…”
Section: Nam Electrical Resistivitymentioning
confidence: 99%