The
development of highly efficient membranes represents a great
opportunity to significantly reduce the environmental impacts of human
activities through gas separation and water filtration; they are also
very attractive for process intensification when coupled to existing
industrial processes. Tubular membranes have higher modularity and
better pressure resistance, and they offer easier sealing than their
flat counterparts. The ability to deposit thin films on their surfaces
is crucial to optimize their chemical and physical properties. However,
the deposition of thin films on tubular membrane supports with conventional
vacuum-based deposition techniques is relatively complex, slow, and
costly. In this work, the versatility of spatial atomic layer deposition
(SALD) and 3D printing technologies has been combined to design and
fabricate a custom SALD manifold for coating tubular substrates. SALD
is a scalable deposition technique, offering high throughput at atmospheric
pressure and thus can be advantageously employed to coat tubular membranes,
enabling high quality thin films to be deposited at the nanoscale
considerably faster than with other conventional techniques. Computational
fluid dynamics calculations by means of COMSOL Multiphysics have been
used to optimize this innovative SALD gas manifold. The proof-of-concept
method of the tubular/cylindrical SALD manifold has been validated
through successful ZnO thin film depositions performed on tubular
Cu foils and porous Al2O3 tubular membrane supports,
demonstrating the capability of SALD to achieve high-throughput depositions
on nonplanar, complex substrates. These results open prospects for
the interface engineering of membranes or electrolyzers, where precise
coatings of tubular surfaces are needed.