Nanocrystalline (nc) scandia-stabilized zirconia (SSZ) electrolytes with scandia contents of 5.9 to 15.9 mol% were synthesized by reactive magnetron sputtering. For scandia content ≥ 9.1 mol%, the as-deposited films were pure cubic phase with <111> texture, while traces of tetragonal phase was found for lower Sc content. Single-line profile analysis of the 111 X-ray diffraction peak yielded an out-of-plane grain size of ~10 nm and a microstrain of 2.0-2.2%, regardless of scandia content, for films deposited at 400 °C and a bias of -70 V. Films deposited at higher bias voltages showed a reduced grain size, yielding a grain size of ~6 nm and a microstrain of ~2.5% at -200 V and -250 V with additional incorporation of argon. Temperature-dependent impedance spectroscopy of the SSZ films showed that the in-plane ionic conductivity had a maximum close to 10.7 mol% and decreased almost an order of magnitude as the scandia -content was increased to 15.9 mol%. The activation energy for oxygen ion migration was determined to be between 1.30 -1.43 eV. In addition, no 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 2 dependence on grain size was observed. The above observations suggest a bulk mechanism for ionic conduction.
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