2019
DOI: 10.1109/access.2019.2907013
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Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating

Abstract: We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ∼ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect o… Show more

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Cited by 7 publications
(7 citation statements)
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“…The TEOIM is characterized as a hybrid technology capable of visualizing the distribution of microwave electric and magnetic near-fields using the polarized light microscopy method 32 , 33 . Figure 1 shows the experimental setup and sample measurement configuration.…”
Section: Methodsmentioning
confidence: 99%
“…The TEOIM is characterized as a hybrid technology capable of visualizing the distribution of microwave electric and magnetic near-fields using the polarized light microscopy method 32 , 33 . Figure 1 shows the experimental setup and sample measurement configuration.…”
Section: Methodsmentioning
confidence: 99%
“…The incident light directed to an OI through a non-polarized beam splitter and propagated to a glass substrate was reflected from the ITO layer of the indicator due to specular reflection. Finally, passing through an analyzer the intensity of light is registered by a CCD camera 4 , 26 .
Figure 1 ( a ) Illustration of the visualization system.
…”
Section: Methodsmentioning
confidence: 99%
“…Generally, OEDs structure is based on TCSs, such as FTO (fluorine-doped tin oxide) glass, ITO (indium tin oxide) glass, FTO PEN (polyethylene naphthalate) plastic, ITO PEN, FTO PET (polyethylene terephthalate), ITO PET, and so on [1][2][3][4][5][6][7][8][9]25]. TCS is constructed of substrate and transparent conductive film.…”
Section: Principlementioning
confidence: 99%
“…Transparent conductive substrates (TCSs) are characterized by their high transmission of visible light and simultaneously very high electrical DC (direct current) sheet conductivity [1][2][3][4][5][6]. TCSs can be applied as the transparent electrodes, which are the key component of optoelectronic devices (OEDs) for information (displays) and energy (photovoltaics, window glass and architectural) technologies [7][8][9]. External quantum efficiency (EQE) is an important physical quantity to evaluate the performance of OEDs.…”
Section: Introductionmentioning
confidence: 99%