Experimental results leading to breakdown voltage (BDV) measurements conducted with blade-blade, hemispherehemisphere and needle-plane electrode configuration in air at STP have been reported in this paper. The applied voltage was 50Hz AC, the electrode material effect on the BDV's was studied in the needle-plane configuration by changing the plane electrode material. Electric field plots for various electrode configurations have been obtained by FEM software package. The results indicate that the overall breakdown strength of the gap in the 100µm to 1000µm gap range shows a marginal increase up to 400 µm and increases as we approach 100 µm irrespective of the geometry. The variations in the spread as we approach lower limit of 100µm is attributed to the electrode configuration and/or electrode material. Further work is in progress to study the prebreakdown behavior. The results are expected to impact MEMS technology.