Electrical humidity response of sol–Gel processed undoped and alkali-doped TiO2–Al2O3 thin films

Sol–gel derived TiO2:ZrO2 multilayer thin films for humidity sensing application

“…A change in resistance by nearly two orders in magnitude has been observed with a negligible change in capacitance. Similar kind of observation has been reported by several authors [26,27].…”

Effect of crystallization on humidity sensing properties of sol–gel derived nanocrystalline TiO2 thin films

“…No considerable change in the capacitance with the change in humidity was observed. Similar kind of observation has been reported by Traversa et al [7] and Faia et al [22]. In porous sintered ceramics, it was found that the value of C 1 increases with increase in RH due to capillary condensation [23] which leads to change in dielectric constant.…”

“…TiO 2 is a promising material for humidity sensing applications both in the thick and thin film forms [5][6][7][8][9][10][11]. There are many reports on humidity sensing properties of thick films of TiO 2 [8][9][10][11], but much less work has been done on the humidity sensing properties of TiO 2 thin films [5][6][7]. Moreover thin films offer faster response and recovery time compared to bulk ceramics.…”

Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films

“…Most humidity detection studies have focused on the use of polymer [1,[5][6][7][8] and ceramic materials [3,[9][10][11][12][13][14][15][16][17][18][19][20] due to their low cost and excellent performance. Ceramic humidity sensors are commercially available, and offer major advantages with high resistance to chemical attack, thermal stability, mechanical strength, and quick response.…”