2002
DOI: 10.1063/1.1506200
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Electrical isolation of InGaP by proton and helium ion irradiation

Abstract: Formation of electrical isolation in n-and p-type In 0.49 Ga 0.51 P epitaxial layers grown on semi-insulating GaAs substrates was investigated using proton or helium ion irradiation. Sheet resistance increases with the irradiation dose, reaching a saturation level of Ϸ10 9 ⍀/ᮀ. The results show that the threshold dose necessary for complete isolation linearly depends on the original carrier concentration either in p-or n-type doped InGaP layers. Thermal stability of the isolation during postirradiation anneali… Show more

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Cited by 11 publications
(4 citation statements)
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“…The displacement damage is considered to depend on the carrier concentration, the crystal orientation, and so forth. 33) However, E d has been considered to depend on not the crystal structure but an element. Moreover, the techniques of estimating the E d are not uniform.…”
Section: Resultsmentioning
confidence: 99%
“…The displacement damage is considered to depend on the carrier concentration, the crystal orientation, and so forth. 33) However, E d has been considered to depend on not the crystal structure but an element. Moreover, the techniques of estimating the E d are not uniform.…”
Section: Resultsmentioning
confidence: 99%
“…Irradiation damage on GaAs has already been extensively studied, including the determination of the range of protons and helium ions [8], irradiation induced changes of index of refraction [9], carrier compensation [10], and annealing effects [11], to give some examples. However, for InGaP material we found only a few reports of irradiation experiments, mostly related to the electrical parameters of the devices [12,13] and few about defects in the material [14,15]. Although for InP and GaP compounds some works show differences between experimental results and simulations regarding the penetration of protons [16], experiments on ion ranges for InGaP have not been reported yet.…”
Section: Introductionmentioning
confidence: 83%
“…2, it is expected that resistivity will increase due to the decrease in grain size and the increase in the grain boundary scattering. The degradation of carrier mobility generally has a relatively small contribution to the total changes in resistivity [10][11][12]. Table 1 Variations of resistivity with high-dose proton irradiation.…”
Section: Proton Irradiation Effects On Electrical Propertiesmentioning
confidence: 98%