2023
DOI: 10.1108/ssmt-04-2023-0017
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Electrical, morphological, optical and mathematical simulations equations studies in CAZO, CZO, AZO and ZNO films

Vali Dalouji,
Nasim Rahimi

Abstract: Purpose In this paper, it can be seen from AFM images of the as-deposited ZnO and CZO films, and the particle size and shape are not clear, while by increasing annealing temperature, they become distinguishable. By increasing temperature to 600°C, ZnO and CZO, CAZO and aluminum-doped zinc oxide (AZO) films particles became almost spherical. Due to high content of Cu in CZO target, and of Al in AZO target which was 5% weight ratio, doping plays a great role in the subject. Therefore, the annealing processing st… Show more

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