2022
DOI: 10.1016/j.ssc.2021.114575
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Electrical properties and conduction mechanisms of heavily iron implanted silicon diodes

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Cited by 4 publications
(5 citation statements)
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“…-I, H(I)-I, and Ri -V plots are different. The difference in š‘… s has been reported before and was explained in terms of an increase in the current rate due to space charge injection in an electric insulating layer at high voltage region [30,31]. The difference in š‘… s values in Table 1, therefore, shows that an insulating layer is formed at metal-semiconductor interface.…”
Section: Current-voltage (I-v) Measurementssupporting
confidence: 48%
See 1 more Smart Citation
“…-I, H(I)-I, and Ri -V plots are different. The difference in š‘… s has been reported before and was explained in terms of an increase in the current rate due to space charge injection in an electric insulating layer at high voltage region [30,31]. The difference in š‘… s values in Table 1, therefore, shows that an insulating layer is formed at metal-semiconductor interface.…”
Section: Current-voltage (I-v) Measurementssupporting
confidence: 48%
“…V. The linear characteristic indicates a uniform doping density in the SCR [31,[39][40][41]. The slope of the linear region was used to determine the doping density of the diode.…”
Section: Capacitance -Voltage (C-v) Measurementsmentioning
confidence: 99%
“…The established from Cheungs and R i - V plots showed discrepancies, which have been reported previously and attributed to an increase in the current generation rate at regions with high voltage [ 30 , 31 ]. This discrepancy suggests the presence of an insulating layer at the m-s interface.…”
Section: Resultsmentioning
confidence: 70%
“…We presented the distinction between linear regions in the C āˆ’2 ā€“ V plots for undoped and doped diodes to examine the doping uniformity in the SCR. The C āˆ’2 ā€“ V plot for undoped diode exhibited a linear region at voltages above approximately 0.25 V. In comparison, the plot for a doped diode had a linear region at voltages above about 1.4 V. A wide linear characteristic in the C āˆ’2 ā€“ V plot of an undoped diode indicates that the doping density is uniform in the SCR [ 31 ]. The results obtained further provide insight into the quality of diode fabrication.…”
Section: Resultsmentioning
confidence: 99%
“…The drastic decrease of R j trend after Fe-implantation is due to the high density of charge carriers generated by the Fe-induced defects. The R s evaluated using different methods differs because of the increase in the current rate as a result of the space charge injection in an electric insulating layer at the region where the voltage is high [40,41]. The discrepancy in R s values given in Table 1, therefore, suggests that there is an insulating layer formed at the m-s interface.…”
Section: Resultsmentioning
confidence: 99%