2018
DOI: 10.1016/j.apsusc.2017.08.058
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Electrical properties of multilayer (DLC-TiC) films produced by pulsed laser deposition

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Cited by 30 publications
(4 citation statements)
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“…And was composed of the overlapped D peak (centered at 1350 cm −1 ) and the G peak (centered at 1580 cm −1 ) corresponding to the A1g and E2g vibrational modes of graphite respectively [26]. The peaks at 265 and 600 cm −1 are associated with the TiC crystal [27]. And the intensity of these peaks increases with sputtering current of graphite, which indicating the quality of the TiC crystal has been improved.…”
Section: Resultsmentioning
confidence: 97%
“…And was composed of the overlapped D peak (centered at 1350 cm −1 ) and the G peak (centered at 1580 cm −1 ) corresponding to the A1g and E2g vibrational modes of graphite respectively [26]. The peaks at 265 and 600 cm −1 are associated with the TiC crystal [27]. And the intensity of these peaks increases with sputtering current of graphite, which indicating the quality of the TiC crystal has been improved.…”
Section: Resultsmentioning
confidence: 97%
“…Finally, providing additional energy to C adatoms by heating the substrate has also been tested, and proved ineffective at increasing the sp 3 fraction, as it appears to not only increase the film graphitization but also degrade its mechanical properties and surface quality [87][88][89][90][91][92]. As will be described in Section 4, in fact, this is an effective method to maximize the sp 2 fraction of the deposited films, which is undesirable in DLC but highly beneficial when the goal is depositing graphenic materials.…”
Section: Additional Sources Of Energymentioning
confidence: 99%
“…Consequently, the grain size decreases first and then increases with increasing bias voltage. [26,27]. The Ti 2p XPS spectra can be fitted into four peaks: the peaks at 453.6 eV and 459.3 eV are assigned to Ti-C bonds, the peak at 454.7 eV is identified as non-stoichiometric TiC x , and the peak located at 456.8 eV is assigned to Ti-O/T=O bond [28,29].…”
Section: Characteristics Of Ti-dlc Coatingmentioning
confidence: 99%
“…As seen, there are two obvious peaks located at 281.8 eV and 284.6 eV of the C1s spectrum, which correspond to C in TiC and a-C:H, respectively. C 1s spectra is deconvoluted into five peaks at 281.8, 282.6, 284.6, 285.6, and 288.6 eV, which are assigned to Ti-C, Ti-C*, sp 2 C, sp 3 C, and C=O, respectively, and the Ti-C* represent the non-stoichiometric TiC x[26,27]. The Ti 2p XPS spectra can be fitted into four peaks: the peaks at 453.6 eV and 459.3 eV are assigned to Ti-C bonds, the peak at 454.7 eV is identified as non-stoichiometric TiC x , and the peak located at 456.8 eV is assigned to Ti-O/T=O bond[28,29].…”
mentioning
confidence: 99%