“…As seen, there are two obvious peaks located at 281.8 eV and 284.6 eV of the C1s spectrum, which correspond to C in TiC and a-C:H, respectively. C 1s spectra is deconvoluted into five peaks at 281.8, 282.6, 284.6, 285.6, and 288.6 eV, which are assigned to Ti-C, Ti-C*, sp 2 C, sp 3 C, and C=O, respectively, and the Ti-C* represent the non-stoichiometric TiC x[26,27]. The Ti 2p XPS spectra can be fitted into four peaks: the peaks at 453.6 eV and 459.3 eV are assigned to Ti-C bonds, the peak at 454.7 eV is identified as non-stoichiometric TiC x , and the peak located at 456.8 eV is assigned to Ti-O/T=O bond[28,29].…”