Electrical validation of through process OPC verification limits

Jaiswal, Omprakash; Kuncha, Rakesh; Bharat, Taksh; Madangarli, V.; Conrad, Edward W.; Bruce, James A.; Marokkey, Sajan

doi:10.1117/12.846572

SPIE Proceedings

2010

DOI: 10.1117/12.846572

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Electrical validation of through process OPC verification limits

Omprakash Jaiswal

Rakesh Kuncha

Taksh Bharat

et al.

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Electrical validation of through process OPC verification limits

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