Electrically separated two-axis MEMS mirror array module for wavelength selective switches

Usui, Mitsuo; Uchiyama, Sadao; Hashimoto, Etsu; Hadama, Koichi; Ishii, Y.; Matsuura, N.; Sakata, Tomomi; Shimoyama, Nobuhiro; Sato, Yasuhiro; Ishii, H.; Matsuura, Takeshi; Shimokawa, Fusao; Uenishi, Yuji

doi:10.1109/omems.2009.5338611

Cited by 14 publications

(5 citation statements)

References 3 publications

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“…The fabricated array is mounted on a ceramic package with a lid as shown in Fig. 7 [5]. It is 28 × 19 × 2.5 mm in size, excluding the pins and the lid.…”

Section: Mems Mirror Array Module and Its Characteristicsmentioning

confidence: 99%

“…To reduce electrical interference, it may be possible to use a U‐shaped electrode and mirror, as shown in Fig. 1 [5].…”

Section: Introductionmentioning

confidence: 99%

“…As a result, the mirror tilts. In such a module, the electric field generated between a mirror and its drive electrodes is blocked by conductive walls and thus does not affect operation of the adjacent mirrors [5]. In particular, to make such a U‐shaped electrode, which has two conductive walls along the edges of a plate electrode, the high‐aspect‐ratio walls for electrical isolation must be precisely positioned without their touching the walls of the adjacent electrodes.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength‐selective switches

Sakata¹,

Usui²,

Uchiyama³

et al. 2011

IEEJ Transactions Elec Engng

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This article describes the fabrication of a microelectromechanical system (MEMS) mirror array and mirror‐drive electrodes with high‐aspect‐ratio gold walls that reduce electrical interference in a wavelength‐selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, can be fabricated with a high yield by encapsulating the mirrors with an organic film that protects them from process damage. The gold walls with a high‐aspect ratio are formed in the narrow space between adjacent mirror‐drive electrodes by using thick‐multilevel interconnection technology. Because of these walls between adjacent electrodes, each MEMS mirror operates with low electrical interference. © 2011 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

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“…The fabricated array is mounted on a ceramic package with a lid as shown in Fig. 7 [5]. It is 28 × 19 × 2.5 mm in size, excluding the pins and the lid.…”

Section: Mems Mirror Array Module and Its Characteristicsmentioning

confidence: 99%

“…To reduce electrical interference, it may be possible to use a U‐shaped electrode and mirror, as shown in Fig. 1 [5].…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength‐selective switches

Sakata¹,

Usui²,

Uchiyama³

et al. 2011

IEEJ Transactions Elec Engng

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“…As a result, the mirror rotates indirectly. In such an array, the electric field generated between a mirror and its drive-electrodes is isolated by the conductive walls of a U-shaped electrode and by a V-groove of a conductive shield cap and thus does not affect the operation of adjacent mirrors [2].…”

Section: Introductionmentioning

confidence: 99%

Monolithic integrated MEMS mirror array module towards low electrical interference

Sakata

Usui

Kodate

et al. 2012

2012 International Conference on Optical MEMS and Nanophotonics

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“…There is a possibility that optical crossconnect (OXC) switches and wavelength selectable switches (WSS) will be widely used in not only the core network but also in metro or access networks. [1][2][3] Three-dimensional (3D) MEMS optical switches for OXC switches and WSSs are attracting great interest as a large-scale all-optical switching fabric because they offer reduced cost, compactness, and low power consumption. A 3D MEMS optical switch provides many advantages, such as low insertion loss, high port numbers, and low polarization-dependent loss.…”

Section: Introductionmentioning

confidence: 99%

High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules

2011

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Downloaded From: http://opticalengineering.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms Optical Engineering 50(7), 074001 (July 2011)Abstract. For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

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Electrically separated two-axis MEMS mirror array module for wavelength selective switches

Cited by 14 publications

References 3 publications

Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength‐selective switches

Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength‐selective switches

Monolithic integrated MEMS mirror array module towards low electrical interference

High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules

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