2019
DOI: 10.1002/admi.201801592
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Electro‐chemomechanical Contribution to Mechanical Actuation in Gd‐Doped Ceria Membranes

Abstract: Gd‐doped ceria (CGO), one of the most extensively studied oxygen ion conductors, is a low dielectric constant/low mechanical compliance material exhibiting large nonclassical electrostriction. The electromechanical response of the micro‐electromechanical devices with CGO films as an active material described previously can not be attributed exclusively to electrostriction. Here it is shown that, below 1 Hz, in addition to electrostriction (second‐harmonic response), there is a strong contribution of the electr… Show more

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Cited by 24 publications
(28 citation statements)
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“…We have applied SPM to investigate the variation in displacement across the central region of the membrane actuator in response to application of 8 V, 50 mHz ( Figure a). In contrast to the electrostrictive response, where this entire region moves in unison due to homogenous expansion of the membrane, [ 15,16 ] here the amplitude | Δh | is maximum ( ∆h max = 0.43 ± 0.02 µm) at the center of that region, while the response at the edge diminishes to ≈25% of maximum. The distribution of displacement amplitude is cylindrically symmetric about the membrane center and all positions sampled move in phase.…”
Section: Resultsmentioning
confidence: 83%
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“…We have applied SPM to investigate the variation in displacement across the central region of the membrane actuator in response to application of 8 V, 50 mHz ( Figure a). In contrast to the electrostrictive response, where this entire region moves in unison due to homogenous expansion of the membrane, [ 15,16 ] here the amplitude | Δh | is maximum ( ∆h max = 0.43 ± 0.02 µm) at the center of that region, while the response at the edge diminishes to ≈25% of maximum. The distribution of displacement amplitude is cylindrically symmetric about the membrane center and all positions sampled move in phase.…”
Section: Resultsmentioning
confidence: 83%
“…Recently, an ECM contribution to the room temperature electromechanical response of an electrostrictive 20 mol% Gd‐doped ceria (Gd 0.2 Ce 0.8 O 1.9 , henceforth 20GDC) tethered membrane, sandwiched between two Ti thin film metal contacts, was reported. [ 15 ] The ECM response was attributed to in situ oxidation/reduction reactions producing several‐nm thick layers of TiO 2−δ [ 16 ] at the upper and lower interface between the 20GDC electrolyte and the Ti metal contacts according to the reversible reaction: Ti + 2O − ⇌ TiO 2−δ , where TiO 2 may take either the rutile or anatase phase. The Ti molar volume increases markedly upon oxidation; [ 15 ] however, once formed, the TiO 2−δ interfacial layers impede further ion diffusion into the metal contact, permitting only very limited response.…”
Section: Introductionmentioning
confidence: 99%
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“…When metals support oxygen ion exchange with aliovalent cation-doped ceria thin films, then the electro-chemomechanical effect (material expansion due to electric-field-induced oxygen diffusion) becomes dominant at low frequencies. 30 Therefore, in earlier work, 21 aluminum electrodes were generally used. In the present report, we have also tested the effects of the addition of sputtered TiN films, as conductive but nonmetallic contacts, as well as sputtered Ta 2 O 5 (20 nm)/Ta films.…”
Section: Methodsmentioning
confidence: 99%
“…The displacement (in response to the applied voltage) was measured with a single-beam Michelson–Morley interferometer [ 14 , 15 , 16 ] equipped with a SR830 lock-in amplifier (Stanford Research Systems Inc., Sunnyvale, CA, USA). A proportional-integral-derivative (PID) feedback system consisting of P-841.01 piezo actuator and E-709.SRG piezo controller (Physik Instrumente, Karlsruhe, Germany) was used for the working point stabilization against the slow changes of the optical path length.…”
Section: Methodsmentioning
confidence: 99%