“…While channel cracking in linearly-elastic systems has been studied extensively starting with the notable works of Gille (1985), Nakamura and Kamath (1992) and Beuth (1992), similar studies on inelastic systems are generally limited to linearly-elastic films on nonlinear substrates undergoing localized yielding, as is the case for thermal type loading (Beuth and Klingbeil, 1996;Ambrico and Begley, 2002). Beyond the usual concerns for structural integrity, channel cracking offers a viable means for determining fracture energy in elastic thin films (Hsueh and Yanaka, 2003;Andersons et al, 2008;Miller et al, 2009;Pinyol et al, 2009), generally with the aid of the steady-state analysis of Beuth (1992). Often this approach is also adopted for ductile films (Macionczyk and Bruckner, 1999;Alaca et al, 2002;Niu et al, 2007;Chen and Gan, 2007), although its validity is yet to be assessed.…”