“…In contrast, completely non-mechanical scanning such as programmable spatial light modulators, modulo 2π optical phased arrays, solid state phase arrays, and liquid crystal electro-optic scanners are emerging, and are now actively researched. 2,[4][5][6][7] In terms of small component inertia, Micro-Electro-Mechanical Systems (MEMS) are promising due to their small size and weight, low production cost, high energy efficiency, and applicability to wide wavelength ranges. These MEMS devices include single resonant mirrors and shifting lenslet arrays.…”