Electro-Optical Frequency Mapping Phase Image Simulation Technique for Failure Analysis

Abstract

We propose a phase image simulation method for Electro-Optical Frequency Mapping (EOFM). The proposed method eases the matching of phase images and circuit layout data, which was previously difficult because phase images are very complex. Physical failure analysis based on this matching result is enabled. Further works are required for understandings of simulated phase images in compound logic cells having many states or high-Z states.