“…It has been established [5] that the loss of water during annealing is a major contributor to the formation of crystalline disorder and, therefore, annealing under a high pressure of water vapor prevents such a disorder to appear. However, using this method only a partial suppression of the subsurface disorder and the related degradation of waveguide properties were obtained [8]. In this paper we show that, using the soft proton exchange (SPE) process [9]− [11] known as allowing the fabrication of low loss and highly efficient nonlinear components, we obtain waveguides in the α-phase [12,13] and free from any water loss [6,8,14], and therefore, we avoid completely these undesirable effects.…”